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Title: Smoothing of mirror substrates by thin-film deposition

Abstract

Superpolished optical flats with high spatial frequency roughness below 0.1 nm have been commercially available for years. However, it is much more difficult to obtain figured optics of similar quality. We have obtained and tested the finish of figured optics from different vendors by atomic force microscopy and optical profilometry and have investigated how the substrate quality can be improved by the deposition of thin films. We have determined the growth parameters of several thin-film structures. From these parameters we can determine how the surface topography of a coated mirror differs from that of the substrate, select the best thin-film structure, and predict the possible improvement. Keywords: Smoothing films, multilayer coatings, finish of mirror substrates

Authors:
; ; ;
Publication Date:
Research Org.:
Lawrence Livermore National Lab., CA (US)
Sponsoring Org.:
USDOE Office of Defense Programs (DP) (US)
OSTI Identifier:
9864
Report Number(s):
UCRL-JC-135146
TRN: US0103221
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Conference
Resource Relation:
Conference: 44th Annual Meeting of the International Symposium on Optical, Science, Engineering and Instrumentation, SPIE/Soft X-Ray Coatings, Aspherics, and Applications, Denver, CO (US), 07/18/1999--07/23/1999; Other Information: PBD: 3 Aug 1999
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; COATINGS; DEPOSITION; MIRRORS; OPTICS; ROUGHNESS; THIN FILMS; US NATIONAL IGNITION FACILITY

Citation Formats

Baker, S, Parra, E, Spiller, E, and Tarrio, C. Smoothing of mirror substrates by thin-film deposition. United States: N. p., 1999. Web.
Baker, S, Parra, E, Spiller, E, & Tarrio, C. Smoothing of mirror substrates by thin-film deposition. United States.
Baker, S, Parra, E, Spiller, E, and Tarrio, C. Tue . "Smoothing of mirror substrates by thin-film deposition". United States. https://www.osti.gov/servlets/purl/9864.
@article{osti_9864,
title = {Smoothing of mirror substrates by thin-film deposition},
author = {Baker, S and Parra, E and Spiller, E and Tarrio, C},
abstractNote = {Superpolished optical flats with high spatial frequency roughness below 0.1 nm have been commercially available for years. However, it is much more difficult to obtain figured optics of similar quality. We have obtained and tested the finish of figured optics from different vendors by atomic force microscopy and optical profilometry and have investigated how the substrate quality can be improved by the deposition of thin films. We have determined the growth parameters of several thin-film structures. From these parameters we can determine how the surface topography of a coated mirror differs from that of the substrate, select the best thin-film structure, and predict the possible improvement. Keywords: Smoothing films, multilayer coatings, finish of mirror substrates},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {8}
}

Conference:
Other availability
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