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Title: Polymer-assisted aqueous deposition of metal oxide films

Abstract

An organic solvent-free process for deposition of metal oxide thin films is presented. The process includes aqueous solutions of necessary metal precursors and an aqueous solution of a water-soluble polymer. After a coating operation, the resultant coating is fired at high temperatures to yield optical quality metal oxide thin films.

Inventors:
 [1];  [1]
  1. Los Alamos, NM
Publication Date:
Research Org.:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
985338
Patent Number(s):
6,589,457
Application Number:
09/629,116
Assignee:
The Regents of the University of California (Los Alamos, NM)
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Li, DeQuan, and Jia, Quanxi. Polymer-assisted aqueous deposition of metal oxide films. United States: N. p., 2003. Web.
Li, DeQuan, & Jia, Quanxi. Polymer-assisted aqueous deposition of metal oxide films. United States.
Li, DeQuan, and Jia, Quanxi. Tue . "Polymer-assisted aqueous deposition of metal oxide films". United States. https://www.osti.gov/servlets/purl/985338.
@article{osti_985338,
title = {Polymer-assisted aqueous deposition of metal oxide films},
author = {Li, DeQuan and Jia, Quanxi},
abstractNote = {An organic solvent-free process for deposition of metal oxide thin films is presented. The process includes aqueous solutions of necessary metal precursors and an aqueous solution of a water-soluble polymer. After a coating operation, the resultant coating is fired at high temperatures to yield optical quality metal oxide thin films.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {7}
}

Patent:

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