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Title: Method for linearizing deflection of a MEMS device using binary electrodes and voltage modulation

Abstract

A micromechanical device comprising one or more electronically movable structure sets comprising for each set a first electrode supported on a substrate and a second electrode supported substantially parallel from said first electrode. Said second electrode is movable with respect to said first electrode whereby an electric potential applied between said first and second electrodes causing said second electrode to move relative to said first electrode a distance X, (X), where X is a nonlinear function of said potential, (V). Means are provided for linearizing the relationship between V and X.

Inventors:
 [1]
  1. West Roxbury, MA
Publication Date:
Research Org.:
Boston University (Boston, MA)
Sponsoring Org.:
USDOE
OSTI Identifier:
983057
Patent Number(s):
7,385,268
Application Number:
10/506,654
Assignee:
Trustees of Boston University (Boston, MA)
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Horenstein, Mark N. Method for linearizing deflection of a MEMS device using binary electrodes and voltage modulation. United States: N. p., 2008. Web.
Horenstein, Mark N. Method for linearizing deflection of a MEMS device using binary electrodes and voltage modulation. United States.
Horenstein, Mark N. Tue . "Method for linearizing deflection of a MEMS device using binary electrodes and voltage modulation". United States. https://www.osti.gov/servlets/purl/983057.
@article{osti_983057,
title = {Method for linearizing deflection of a MEMS device using binary electrodes and voltage modulation},
author = {Horenstein, Mark N},
abstractNote = {A micromechanical device comprising one or more electronically movable structure sets comprising for each set a first electrode supported on a substrate and a second electrode supported substantially parallel from said first electrode. Said second electrode is movable with respect to said first electrode whereby an electric potential applied between said first and second electrodes causing said second electrode to move relative to said first electrode a distance X, (X), where X is a nonlinear function of said potential, (V). Means are provided for linearizing the relationship between V and X.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {6}
}

Patent:

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