Method for linearizing deflection of a MEMS device using binary electrodes and voltage modulation
Patent
·
OSTI ID:983057
- West Roxbury, MA
A micromechanical device comprising one or more electronically movable structure sets comprising for each set a first electrode supported on a substrate and a second electrode supported substantially parallel from said first electrode. Said second electrode is movable with respect to said first electrode whereby an electric potential applied between said first and second electrodes causing said second electrode to move relative to said first electrode a distance X, (X), where X is a nonlinear function of said potential, (V). Means are provided for linearizing the relationship between V and X.
- Research Organization:
- Boston University (Boston, MA)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Trustees of Boston University (Boston, MA)
- Patent Number(s):
- 7,385,268
- Application Number:
- 10/506,654
- OSTI ID:
- 983057
- Country of Publication:
- United States
- Language:
- English
Similar Records
Ionization chamber for measuring the profile of a radiation field of electron or X-ray radiation
Liquid metal electrodes for gas separation
Currents between tethered electrodes in a magnetized laboratory plasma
Patent
·
Tue Apr 30 00:00:00 EDT 1985
·
OSTI ID:983057
Liquid metal electrodes for gas separation
Patent
·
Tue Oct 02 00:00:00 EDT 2018
·
OSTI ID:983057
+1 more
Currents between tethered electrodes in a magnetized laboratory plasma
Journal Article
·
Tue May 01 00:00:00 EDT 1990
· Journal of Geophysical Research; (United States)
·
OSTI ID:983057