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Title: Three Dimensional Imaging of Individual Hafnium Atoms at a Si/SiO 2/HfO 2 Dielectric Interface

Abstract

No abstract prepared.

Authors:
 [1];  [2];  [1];  [3];  [2];  [2];  [3];  [2]
  1. Samsung Advanced Institute of Science and Technology, Korea
  2. ORNL
  3. Samsung Electronics Co., Ltd. Korea
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
978203
DOE Contract Number:  
DE-AC05-00OR22725
Resource Type:
Journal Article
Resource Relation:
Journal Name: SAMSUNG Journal of Innovative Technology; Journal Volume: 1; Journal Issue: 1
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ATOMS; DIELECTRIC MATERIALS; HAFNIUM; STEM; aberration correction; 3D

Citation Formats

Baik, Hion Suck, van Benthem, Klaus, Kim, Miyoung, Doh, SeokJoo, Luck, Julia T, Lupini, Andrew R, Lee, Jong-Hoo, and Pennycook, Stephen J. Three Dimensional Imaging of Individual Hafnium Atoms at a Si/SiO2/HfO2 Dielectric Interface. United States: N. p., 2005. Web.
Baik, Hion Suck, van Benthem, Klaus, Kim, Miyoung, Doh, SeokJoo, Luck, Julia T, Lupini, Andrew R, Lee, Jong-Hoo, & Pennycook, Stephen J. Three Dimensional Imaging of Individual Hafnium Atoms at a Si/SiO2/HfO2 Dielectric Interface. United States.
Baik, Hion Suck, van Benthem, Klaus, Kim, Miyoung, Doh, SeokJoo, Luck, Julia T, Lupini, Andrew R, Lee, Jong-Hoo, and Pennycook, Stephen J. Mon . "Three Dimensional Imaging of Individual Hafnium Atoms at a Si/SiO2/HfO2 Dielectric Interface". United States.
@article{osti_978203,
title = {Three Dimensional Imaging of Individual Hafnium Atoms at a Si/SiO2/HfO2 Dielectric Interface},
author = {Baik, Hion Suck and van Benthem, Klaus and Kim, Miyoung and Doh, SeokJoo and Luck, Julia T and Lupini, Andrew R and Lee, Jong-Hoo and Pennycook, Stephen J},
abstractNote = {No abstract prepared.},
doi = {},
journal = {SAMSUNG Journal of Innovative Technology},
number = 1,
volume = 1,
place = {United States},
year = {Mon Aug 01 00:00:00 EDT 2005},
month = {Mon Aug 01 00:00:00 EDT 2005}
}