skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Sub-microradian Surface Slope Metrology with the ALS Developmental Long Trace Profiler

Abstract

A new low budget slope measuring instrument, the Developmental Long Trace Profiler (DLTP), was recently brought to operation at the ALS Optical Metrology Laboratory. The design, instrumental control and data acquisition system, initial alignment and calibration procedures, as well as the developed experimental precautions and procedures are described in detail. The capability of the DLTP to achieve sub-microradian surface slope metrology is verified via cross-comparison measurements with other high performance slope measuring instruments when measuring the same high quality test optics. The directions of future work to develop a surface slope measuring profiler with nano-radian performance are also discussed.

Authors:
; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
Advanced Light Source Division; Engineering Division
OSTI Identifier:
973384
Report Number(s):
LBNL-2539E
DOE Contract Number:  
DE-AC02-05CH11231
Resource Type:
Conference
Resource Relation:
Conference: INTERNATIONAL WORKSHOP ON X-RAY MIRROR DESIGN, FABRICATION, AND METROLOGY, Osaka, Japan, September 22-24, 2009
Country of Publication:
United States
Language:
English
Subject:
47; x-ray optics, surface metrology, surface slope measurement, long trace profiler, LTP, surface profilometer, autocollimator, pentaprism

Citation Formats

Yashchuk, Valeriy V, Barber, Samuel, Domning, Edward E, Kirschman, Jonathan L, Morrison, Gregory Y, Smith, Brian V, Siewert, Frank, Zeschke, Thomas, Geckeler, Ralf, and Just, Andreas. Sub-microradian Surface Slope Metrology with the ALS Developmental Long Trace Profiler. United States: N. p., 2009. Web.
Yashchuk, Valeriy V, Barber, Samuel, Domning, Edward E, Kirschman, Jonathan L, Morrison, Gregory Y, Smith, Brian V, Siewert, Frank, Zeschke, Thomas, Geckeler, Ralf, & Just, Andreas. Sub-microradian Surface Slope Metrology with the ALS Developmental Long Trace Profiler. United States.
Yashchuk, Valeriy V, Barber, Samuel, Domning, Edward E, Kirschman, Jonathan L, Morrison, Gregory Y, Smith, Brian V, Siewert, Frank, Zeschke, Thomas, Geckeler, Ralf, and Just, Andreas. Fri . "Sub-microradian Surface Slope Metrology with the ALS Developmental Long Trace Profiler". United States. https://www.osti.gov/servlets/purl/973384.
@article{osti_973384,
title = {Sub-microradian Surface Slope Metrology with the ALS Developmental Long Trace Profiler},
author = {Yashchuk, Valeriy V and Barber, Samuel and Domning, Edward E and Kirschman, Jonathan L and Morrison, Gregory Y and Smith, Brian V and Siewert, Frank and Zeschke, Thomas and Geckeler, Ralf and Just, Andreas},
abstractNote = {A new low budget slope measuring instrument, the Developmental Long Trace Profiler (DLTP), was recently brought to operation at the ALS Optical Metrology Laboratory. The design, instrumental control and data acquisition system, initial alignment and calibration procedures, as well as the developed experimental precautions and procedures are described in detail. The capability of the DLTP to achieve sub-microradian surface slope metrology is verified via cross-comparison measurements with other high performance slope measuring instruments when measuring the same high quality test optics. The directions of future work to develop a surface slope measuring profiler with nano-radian performance are also discussed.},
doi = {},
url = {https://www.osti.gov/biblio/973384}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2009},
month = {9}
}

Conference:
Other availability
Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.

Save / Share: