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Title: A microstitching interferometer for evaluating the surface profile of precisely figured hard x-ray K-B mirrors.

Abstract

Fabrication and evaluation of elliptical X-ray mirrors, such as Kirkpatrick-Baez (K-B) mirrors produced by the profile-coating technique, requires accurate surface figure measurements over a wide range of spatial frequencies. Microstitching interferometry has proven to fulfill this requirement for length scales from a few {micro}m up to the full mirror length. At the Advanced Photon Source, a state-of-the-art microroughness microscope interferometer that incorporates advanced microstitching capability has been used to obtain measurements of profile-coated elliptical K-B mirrors. The stitched surface height data provide previously unattainable resolution and reproducibility, which has facilitated the fabrication of ultrasmooth (< 1 nm rms residual height) profile-coated mirrors, whose hard X-ray focusing performance is expected to approach the diffraction limit. This paper describes the system capabilities and limitations. Results of measurements obtained with it will be discussed and compared with those obtained with the Long Trace Profiler.

Authors:
; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
970794
Report Number(s):
ANL/XSD/CP-60273
TRN: US1000913
DOE Contract Number:  
DE-AC02-06CH11357
Resource Type:
Conference
Resource Relation:
Conference: SPIE Optics and Photonics 2007; Aug. 26, 2007 - Aug. 30, 2007; San Diego, CA
Country of Publication:
United States
Language:
ENGLISH
Subject:
43 PARTICLE ACCELERATORS; ADVANCED PHOTON SOURCE; DIFFRACTION; EVALUATION; FABRICATION; FOCUSING; INTERFEROMETERS; INTERFEROMETRY; MICROSCOPES; MIRRORS; OPTICS; PERFORMANCE; RESOLUTION; HARD X RADIATION

Citation Formats

Assoufid, L., Qian, J., Kewish, C. M., Liu, C., Conley, R., Macrander, A. T., Lindley, D., Saxer, C., X-Ray Science Division, and KLA-Tencor. A microstitching interferometer for evaluating the surface profile of precisely figured hard x-ray K-B mirrors.. United States: N. p., 2007. Web. doi:10.1117/12.736384.
Assoufid, L., Qian, J., Kewish, C. M., Liu, C., Conley, R., Macrander, A. T., Lindley, D., Saxer, C., X-Ray Science Division, & KLA-Tencor. A microstitching interferometer for evaluating the surface profile of precisely figured hard x-ray K-B mirrors.. United States. doi:10.1117/12.736384.
Assoufid, L., Qian, J., Kewish, C. M., Liu, C., Conley, R., Macrander, A. T., Lindley, D., Saxer, C., X-Ray Science Division, and KLA-Tencor. Mon . "A microstitching interferometer for evaluating the surface profile of precisely figured hard x-ray K-B mirrors.". United States. doi:10.1117/12.736384.
@article{osti_970794,
title = {A microstitching interferometer for evaluating the surface profile of precisely figured hard x-ray K-B mirrors.},
author = {Assoufid, L. and Qian, J. and Kewish, C. M. and Liu, C. and Conley, R. and Macrander, A. T. and Lindley, D. and Saxer, C. and X-Ray Science Division and KLA-Tencor},
abstractNote = {Fabrication and evaluation of elliptical X-ray mirrors, such as Kirkpatrick-Baez (K-B) mirrors produced by the profile-coating technique, requires accurate surface figure measurements over a wide range of spatial frequencies. Microstitching interferometry has proven to fulfill this requirement for length scales from a few {micro}m up to the full mirror length. At the Advanced Photon Source, a state-of-the-art microroughness microscope interferometer that incorporates advanced microstitching capability has been used to obtain measurements of profile-coated elliptical K-B mirrors. The stitched surface height data provide previously unattainable resolution and reproducibility, which has facilitated the fabrication of ultrasmooth (< 1 nm rms residual height) profile-coated mirrors, whose hard X-ray focusing performance is expected to approach the diffraction limit. This paper describes the system capabilities and limitations. Results of measurements obtained with it will be discussed and compared with those obtained with the Long Trace Profiler.},
doi = {10.1117/12.736384},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2007},
month = {Mon Jan 01 00:00:00 EST 2007}
}

Conference:
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