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Title: Second metrology round-robin of APS, ESRF and SPring-8 laboratories of elliptical and spherical hard-x-ray mirrors.

Abstract

The first series of metrology round-robin measurements carried out in 2005 at the APS, ESRF and SPring-8 metrology laboratories involving two flat x-ray mirrors and a cylindrical x-ray mirror has shown excellent agreement among the three facilities Long Trace Profilers (LTP) despite their architectural differences. Because of the growing interest in diffraction-limited hard x-ray K-B focusing mirrors, it was decided to extend the round robin measurements to spherical and aspheric x-ray mirrors. The strong surface slope variation of these mirrors presents a real challenge to LTP. As a result, new LTP measurement protocol has to be developed and implemented to ensure measurement accuracy and consistency. In this paper, different measurement techniques and procedures will be described, the results will be discussed, and comparison will be extended to micro-stitching interferometry measurements performed at Osaka University, Japan.

Authors:
; ; ; ; ; ; ; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
970793
Report Number(s):
ANL/XSD/CP-60132
TRN: US201003%%128
DOE Contract Number:  
DE-AC02-06CH11357
Resource Type:
Conference
Resource Relation:
Conference: SPIE Optics and Photonics 2007; Aug. 26, 2007 - Aug. 30, 2007; San Diego, CA
Country of Publication:
United States
Language:
ENGLISH
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ACCURACY; FOCUSING; INTERFEROMETRY; MIRRORS; OPTICS; HARD X RADIATION

Citation Formats

Rommeveaux, A., Assoufid, L., Ohashi, H., Mimura, H., Yamauchi, K., Qian, J., Ishikawa, T., Morawe, C., Macrander, A.T., Khounsary, A., Goto, S., X-Ray Science Division, ESRF, JASRI SPring-8, Osaka Univ., and Riken SPring-8 Center. Second metrology round-robin of APS, ESRF and SPring-8 laboratories of elliptical and spherical hard-x-ray mirrors.. United States: N. p., 2007. Web. doi:10.1117/12.736171.
Rommeveaux, A., Assoufid, L., Ohashi, H., Mimura, H., Yamauchi, K., Qian, J., Ishikawa, T., Morawe, C., Macrander, A.T., Khounsary, A., Goto, S., X-Ray Science Division, ESRF, JASRI SPring-8, Osaka Univ., & Riken SPring-8 Center. Second metrology round-robin of APS, ESRF and SPring-8 laboratories of elliptical and spherical hard-x-ray mirrors.. United States. doi:10.1117/12.736171.
Rommeveaux, A., Assoufid, L., Ohashi, H., Mimura, H., Yamauchi, K., Qian, J., Ishikawa, T., Morawe, C., Macrander, A.T., Khounsary, A., Goto, S., X-Ray Science Division, ESRF, JASRI SPring-8, Osaka Univ., and Riken SPring-8 Center. Mon . "Second metrology round-robin of APS, ESRF and SPring-8 laboratories of elliptical and spherical hard-x-ray mirrors.". United States. doi:10.1117/12.736171.
@article{osti_970793,
title = {Second metrology round-robin of APS, ESRF and SPring-8 laboratories of elliptical and spherical hard-x-ray mirrors.},
author = {Rommeveaux, A. and Assoufid, L. and Ohashi, H. and Mimura, H. and Yamauchi, K. and Qian, J. and Ishikawa, T. and Morawe, C. and Macrander, A.T. and Khounsary, A. and Goto, S. and X-Ray Science Division and ESRF and JASRI SPring-8 and Osaka Univ. and Riken SPring-8 Center},
abstractNote = {The first series of metrology round-robin measurements carried out in 2005 at the APS, ESRF and SPring-8 metrology laboratories involving two flat x-ray mirrors and a cylindrical x-ray mirror has shown excellent agreement among the three facilities Long Trace Profilers (LTP) despite their architectural differences. Because of the growing interest in diffraction-limited hard x-ray K-B focusing mirrors, it was decided to extend the round robin measurements to spherical and aspheric x-ray mirrors. The strong surface slope variation of these mirrors presents a real challenge to LTP. As a result, new LTP measurement protocol has to be developed and implemented to ensure measurement accuracy and consistency. In this paper, different measurement techniques and procedures will be described, the results will be discussed, and comparison will be extended to micro-stitching interferometry measurements performed at Osaka University, Japan.},
doi = {10.1117/12.736171},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2007},
month = {Mon Jan 01 00:00:00 EST 2007}
}

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