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Title: Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates

Abstract

The invention includes methods of forming a metallic coating on a substrate which contains silicon. A metallic glass layer is formed over a silicon surface of the substrate. The invention includes methods of protecting a silicon substrate. The substrate is provided within a deposition chamber along with a deposition target. Material from the deposition target is deposited over at least a portion of the silicon substrate to form a protective layer or structure which contains metallic glass. The metallic glass comprises iron and one or more of B, Si, P and C. The invention includes structures which have a substrate containing silicon and a metallic layer over the substrate. The metallic layer contains less than or equal to about 2 weight % carbon and has a hardness of at least 9.2 GPa. The metallic layer can have an amorphous microstructure or can be devitrified to have a nanocrystalline microstructure.

Inventors:
 [1];  [1];  [2]
  1. Idaho Falls, ID
  2. Los Alamos, NM
Publication Date:
Research Org.:
Bechtel BWXT Idaho, LLC (Idaho Falls, ID)
Sponsoring Org.:
USDOE
OSTI Identifier:
970494
Patent Number(s):
7,341,765
Application Number:
10/918,287
Assignee:
Battelle Energy Alliance, LLC (Idaho Falls, ID)
DOE Contract Number:  
AC07-99ID13727
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Branagan, Daniel J, Hyde, Timothy A, and Fincke, James R. Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates. United States: N. p., 2008. Web.
Branagan, Daniel J, Hyde, Timothy A, & Fincke, James R. Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates. United States.
Branagan, Daniel J, Hyde, Timothy A, and Fincke, James R. Tue . "Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates". United States. https://www.osti.gov/servlets/purl/970494.
@article{osti_970494,
title = {Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates},
author = {Branagan, Daniel J and Hyde, Timothy A and Fincke, James R},
abstractNote = {The invention includes methods of forming a metallic coating on a substrate which contains silicon. A metallic glass layer is formed over a silicon surface of the substrate. The invention includes methods of protecting a silicon substrate. The substrate is provided within a deposition chamber along with a deposition target. Material from the deposition target is deposited over at least a portion of the silicon substrate to form a protective layer or structure which contains metallic glass. The metallic glass comprises iron and one or more of B, Si, P and C. The invention includes structures which have a substrate containing silicon and a metallic layer over the substrate. The metallic layer contains less than or equal to about 2 weight % carbon and has a hardness of at least 9.2 GPa. The metallic layer can have an amorphous microstructure or can be devitrified to have a nanocrystalline microstructure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {3}
}

Patent:

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