MEMS packaging.
Conference
·
OSTI ID:969097
No abstract prepared.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 969097
- Report Number(s):
- SAND2005-4002C; TRN: US201001%%247
- Resource Relation:
- Conference: Proposed for presentation at the Microsystems: Today's Revolutionary Technology for Tomorrow held July 25-26, 2005 in Santa Clara, CA.
- Country of Publication:
- United States
- Language:
- English
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