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Title: Effects of gold patterning on the bending profile and frequency response of a microcantilever

Abstract

We have systematically investigated the effect of various gold patterns on the bending profile and frequency response of a microcantilever. The gold patterns were deposited on the cantilever arrays using four types of shadow mask. The local bending profile, slope, and curvature varied depending on the area and position of the gold pattern. Also, the variations in the first three modes of the flexural resonance frequencies of the gold patterned cantilevers were measured to understand the opposing effects of mass loading and flexural rigidity; both of these parameters are dependent on the position and area of the gold pattern. The experimental results validated the theoretical one-dimensional model introduced by Tamayo et al. Appl. Phys. Lett. 89, 224104 2006 and our calculations using the finite element method. The gold patterns giving the maximum response of the mass loading and flexural rigidity change were determined by examining how the relative resonance frequency shifts as a function of the distance of the gold coating from the free end or clamping region. The results of this study can potentially be applied in the design of a microcantilever sensor in which pattern analysis is utilized to determine the presence of adsorbed biological and chemical molecules.

Authors:
 [1];  [2];  [1];  [2];  [1]
  1. Pohang University of Science and Technology (POSTECH), Pohang, Republic of Korea
  2. ORNL
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
967999
DOE Contract Number:  
DE-AC05-00OR22725
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 106; Journal Issue: 2; Journal ID: ISSN 0021-8979
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; BENDING; COATINGS; DESIGN; FINITE ELEMENT METHOD; GOLD; MACHINE PARTS; MINIATURIZATION; FREQUENCY RESPONSE TESTING; MATHEMATICAL MODELS; SENSORS

Citation Formats

Lee, Dongkyu, Kim, Seonghwan Sam, Jung, Namchul, Thundat, Thomas George, and Jeon, Sangmin. Effects of gold patterning on the bending profile and frequency response of a microcantilever. United States: N. p., 2009. Web. doi:10.1063/1.3177326.
Lee, Dongkyu, Kim, Seonghwan Sam, Jung, Namchul, Thundat, Thomas George, & Jeon, Sangmin. Effects of gold patterning on the bending profile and frequency response of a microcantilever. United States. https://doi.org/10.1063/1.3177326
Lee, Dongkyu, Kim, Seonghwan Sam, Jung, Namchul, Thundat, Thomas George, and Jeon, Sangmin. Thu . "Effects of gold patterning on the bending profile and frequency response of a microcantilever". United States. https://doi.org/10.1063/1.3177326.
@article{osti_967999,
title = {Effects of gold patterning on the bending profile and frequency response of a microcantilever},
author = {Lee, Dongkyu and Kim, Seonghwan Sam and Jung, Namchul and Thundat, Thomas George and Jeon, Sangmin},
abstractNote = {We have systematically investigated the effect of various gold patterns on the bending profile and frequency response of a microcantilever. The gold patterns were deposited on the cantilever arrays using four types of shadow mask. The local bending profile, slope, and curvature varied depending on the area and position of the gold pattern. Also, the variations in the first three modes of the flexural resonance frequencies of the gold patterned cantilevers were measured to understand the opposing effects of mass loading and flexural rigidity; both of these parameters are dependent on the position and area of the gold pattern. The experimental results validated the theoretical one-dimensional model introduced by Tamayo et al. Appl. Phys. Lett. 89, 224104 2006 and our calculations using the finite element method. The gold patterns giving the maximum response of the mass loading and flexural rigidity change were determined by examining how the relative resonance frequency shifts as a function of the distance of the gold coating from the free end or clamping region. The results of this study can potentially be applied in the design of a microcantilever sensor in which pattern analysis is utilized to determine the presence of adsorbed biological and chemical molecules.},
doi = {10.1063/1.3177326},
url = {https://www.osti.gov/biblio/967999}, journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 2,
volume = 106,
place = {United States},
year = {2009},
month = {1}
}