Polymer derived silicon carbonitride for harsh environment microsystems applications.
Conference
·
OSTI ID:965476
- University of Colorado at Boulder
No abstract prepared.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 965476
- Report Number(s):
- SAND2004-5851C; TRN: US200920%%309
- Resource Relation:
- Conference: Proposed for presentation at the American Indian Science and Engineering Society National Conference held November 11-13, 2004 in Anchorage, AK.
- Country of Publication:
- United States
- Language:
- English
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