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Extended-range tiltable micromirror

Patent ·
OSTI ID:963810
 [1];  [2];  [3]
  1. Albuquerque, NM
  2. Newberry, FL
  3. Gainesville, FL
+ Show Author Affiliations
A tiltable micromirror device is disclosed in which a micromirror is suspended by a progressive linkage with an electrostatic actuator (e.g. a vertical comb actuator or a capacitive plate electrostatic actuator) being located beneath the micromirror. The progressive linkage includes a pair of torsion springs which are connected together to operate similar to a four-bar linkage with spring joints. The progressive linkage provides a non-linear spring constant which can allow the micromirror to be tilted at any angle within its range substantially free from any electrostatic instability or hysteretic behavior.
Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM
Sponsoring Organization:
United States Department of Energy
DOE Contract Number:
AC04-94AL85000
Assignee:
Allen, James J. (Albuquerque, NM); Wiens, Gloria J. (Newberry, FL); Bronson, Jessica R. (Gainesville, FL)
Patent Number(s):
7,529,016
Application Number:
11/494,223
OSTI ID:
963810
Country of Publication:
United States
Language:
English

References (10)

Nonlinear flexures for stable deflection of an electrostatically actuated micromirror conference September 1997
Self-assembly technique for MEMS vertical comb electrostatic actuator journal January 2005
Extending the travel range of analog-tuned electrostatic actuators journal January 1999
Increasing the Dynamic Range of a Micromechanical Moving-Plate Capacitor journal October 2001
Travel range extension of a MEMS electrostatic microactuator journal January 2005
Modeling and Alleviating Instability in a MEMS Vertical Comb Drive Using a Progressive Linkage
  • Bronson, Jessica R.; Wiens, Gloria J.; Allen, James J.
  • ASME 2005 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, Volume 7: 29th Mechanisms and Robotics Conference, Parts A and B https://doi.org/10.1115/DETC2005-84217
conference June 2008
Electrostatic micromechanical actuator with extended range of travel journal September 2000
Pivoting micromirror designs for large orientation angles conference August 2000
A Monolithic Micro Four-Bar Mechanism With Flexure Hinges
  • Lee, Sang-Joon John; Yee, Raymond K.; Kelley, Reginald
  • ASME 2004 International Mechanical Engineering Congress and Exposition, Microelectromechanical Systems https://doi.org/10.1115/IMECE2004-62263
conference March 2008
Stabilization of electrostatically actuated mechanical devices conference January 1997

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