Binary Pseudo-Random Gratings and Arrays for Calibration of Modulation Transfer Function of Surface Profilometers
Conference
·
OSTI ID:962708
In the present work, we describe application of binary pseudo-random gratings (BPRG) and arrays (BPRA) as effective 1D and 2D test surfaces suitable for calibration of different surface profilometers, including a number of interferometric microscopes and scatterometers.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- Advanced Light Source Division; Engineering Division; Materials Sciences Division
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 962708
- Report Number(s):
- LBNL-2033E; TRN: US200916%%345
- Resource Relation:
- Conference: INTERNATIONAL WORKSHOP ON X-RAY MIRROR DESIGN, FABRICATION, AND METROLOGY, Osaka University, Japan, September 22 - 24, 2009
- Country of Publication:
- United States
- Language:
- English
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