Method of using sacrificial materials for fabricating internal cavities in laminated dielectric structures
- Albuquerque, NM
A method of using sacrificial materials for fabricating internal cavities and channels in laminated dielectric structures, which can be used as dielectric substrates and package mounts for microelectronic and microfluidic devices. A sacrificial mandrel is placed in-between two or more sheets of a deformable dielectric material (e.g., unfired LTCC glass/ceramic dielectric), wherein the sacrificial mandrel is not inserted into a cutout made in any of the sheets. The stack of sheets is laminated together, which deforms the sheet or sheets around the sacrificial mandrel. After lamination, the mandrel is removed, (e.g., during LTCC burnout), thereby creating a hollow internal cavity in the monolithic ceramic structure.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM
- Sponsoring Organization:
- United States Department of Energy
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- 7,494,557
- Application Number:
- 10/768,329
- OSTI ID:
- 960215
- Country of Publication:
- United States
- Language:
- English
Overview of low temperature co-fired ceramics tape technology for meso-system technology (MsST)
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journal | April 2001 |
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