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Title: Method of using sacrificial materials for fabricating internal cavities in laminated dielectric structures

Abstract

A method of using sacrificial materials for fabricating internal cavities and channels in laminated dielectric structures, which can be used as dielectric substrates and package mounts for microelectronic and microfluidic devices. A sacrificial mandrel is placed in-between two or more sheets of a deformable dielectric material (e.g., unfired LTCC glass/ceramic dielectric), wherein the sacrificial mandrel is not inserted into a cutout made in any of the sheets. The stack of sheets is laminated together, which deforms the sheet or sheets around the sacrificial mandrel. After lamination, the mandrel is removed, (e.g., during LTCC burnout), thereby creating a hollow internal cavity in the monolithic ceramic structure.

Inventors:
 [1]
  1. Albuquerque, NM
Publication Date:
Research Org.:
Sandia National Laboratories (SNL-NM), Albuquerque, NM
Sponsoring Org.:
USDOE
OSTI Identifier:
960215
Patent Number(s):
7,494,557
Application Number:
10/768,329
Assignee:
Sandia Corporation (Albuquerque, NM) ALO
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Peterson, Kenneth A. Method of using sacrificial materials for fabricating internal cavities in laminated dielectric structures. United States: N. p., 2009. Web.
Peterson, Kenneth A. Method of using sacrificial materials for fabricating internal cavities in laminated dielectric structures. United States.
Peterson, Kenneth A. Tue . "Method of using sacrificial materials for fabricating internal cavities in laminated dielectric structures". United States. https://www.osti.gov/servlets/purl/960215.
@article{osti_960215,
title = {Method of using sacrificial materials for fabricating internal cavities in laminated dielectric structures},
author = {Peterson, Kenneth A},
abstractNote = {A method of using sacrificial materials for fabricating internal cavities and channels in laminated dielectric structures, which can be used as dielectric substrates and package mounts for microelectronic and microfluidic devices. A sacrificial mandrel is placed in-between two or more sheets of a deformable dielectric material (e.g., unfired LTCC glass/ceramic dielectric), wherein the sacrificial mandrel is not inserted into a cutout made in any of the sheets. The stack of sheets is laminated together, which deforms the sheet or sheets around the sacrificial mandrel. After lamination, the mandrel is removed, (e.g., during LTCC burnout), thereby creating a hollow internal cavity in the monolithic ceramic structure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2009},
month = {2}
}

Patent:

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