Electronic Structure Characterization of Ultra Low-k Carbon Doped Oxide using Soft X-ray Emission Spectroscopy
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source
- Sponsoring Organization:
- Doe - Office Of Science
- DOE Contract Number:
- DE-AC02-98CH10886
- OSTI ID:
- 959976
- Report Number(s):
- BNL-82962-2009-JA
- Journal Information:
- Thin Solid Films, Vol. 516
- Country of Publication:
- United States
- Language:
- English
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