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Title: The role of carrier gases in the production of metastable argon atoms in an RF discharge.

Abstract

We investigate the role of carrier gases in the production of metastable argon atoms in a rf-driven discharge. The effects of different carrier gases (krypton, xenon, neon, and helium), carrier gas pressures, and rf discharge powers are examined. A xenon carrier gas provides the greatest metastable population of argon, yielding an optimal fractional metastable population of argon (Ar*/Ar) of 2 x 10{sup -4} at 0.2 mTorr of xenon gas. The optimal krypton configuration yields 60% of the xenon-supported population at 1.5 times higher pressure. Neon and helium perform considerably worse probably due to their higher ionization potentials.

Authors:
; ;
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
953463
Report Number(s):
ANL/PHY/JA-63327
Journal ID: ISSN 0034-6748; RSINAK; TRN: US0902699
DOE Contract Number:  
DE-AC02-06CH11357
Resource Type:
Journal Article
Journal Name:
Rev. Sci. Instrum.
Additional Journal Information:
Journal Volume: 8; Journal Issue: Mar. 2009; Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
ENGLISH
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ARGON; ATOMS; HELIUM; IONIZATION POTENTIAL; KRYPTON; NEON; PRODUCTION; XENON; RF SYSTEMS

Citation Formats

Rudinger, K, Lu, Z T, Mueller, P, and Physics. The role of carrier gases in the production of metastable argon atoms in an RF discharge.. United States: N. p., 2009. Web. doi:10.1063/1.3105722.
Rudinger, K, Lu, Z T, Mueller, P, & Physics. The role of carrier gases in the production of metastable argon atoms in an RF discharge.. United States. https://doi.org/10.1063/1.3105722
Rudinger, K, Lu, Z T, Mueller, P, and Physics. 2009. "The role of carrier gases in the production of metastable argon atoms in an RF discharge.". United States. https://doi.org/10.1063/1.3105722.
@article{osti_953463,
title = {The role of carrier gases in the production of metastable argon atoms in an RF discharge.},
author = {Rudinger, K and Lu, Z T and Mueller, P and Physics},
abstractNote = {We investigate the role of carrier gases in the production of metastable argon atoms in a rf-driven discharge. The effects of different carrier gases (krypton, xenon, neon, and helium), carrier gas pressures, and rf discharge powers are examined. A xenon carrier gas provides the greatest metastable population of argon, yielding an optimal fractional metastable population of argon (Ar*/Ar) of 2 x 10{sup -4} at 0.2 mTorr of xenon gas. The optimal krypton configuration yields 60% of the xenon-supported population at 1.5 times higher pressure. Neon and helium perform considerably worse probably due to their higher ionization potentials.},
doi = {10.1063/1.3105722},
url = {https://www.osti.gov/biblio/953463}, journal = {Rev. Sci. Instrum.},
issn = {0034-6748},
number = Mar. 2009,
volume = 8,
place = {United States},
year = {2009},
month = {3}
}