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Title: Morphology, microstructure, stress and damage properties of thin film coatings for the LCLS x-ray mirrors

Abstract

The development and properties of reflective coatings for the x-ray offset mirror systems of the Linac Coherent Light Source (LCLS) free-electron laser (FEL) are discussed in this manuscript. The uniquely high instantaneous dose of the LCLS FEL beam translates to strict limits in terms of materials choice, thus leading to an x-ray mirror design consisting of a reflective coating deposited on a silicon substrate. Coherent wavefront preservation requirements for these mirrors result in stringent surface figure and finish specifications. DC-magnetron sputtered B{sub 4}C and SiC thin film coatings with optimized stress, roughness and figure properties for the LCLS x-ray mirrors are presented. The evolution of microstructure, morphology, and stress of these thin films versus deposition conditions is discussed. Experimental results on the performance of these coatings with respect to FEL damage are also presented.

Authors:
; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
953285
Report Number(s):
LLNL-CONF-412951
Journal ID: ISSN 0277-786X; TRN: US0902737
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Conference
Resource Relation:
Journal Volume: 7361; Conference: Presented at: Damage to VUV, EUV and X-ray Optics II, SPIE Europe Optics and Optoelectronics, Prague, Czech Republic, Apr 20 - Apr 23, 2009
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUMM MECHANICS, GENERAL PHYSICS; COATINGS; DEPOSITION; FREE ELECTRON LASERS; LIGHT SOURCES; LINEAR ACCELERATORS; MICROSTRUCTURE; MIRRORS; MORPHOLOGY; OPTICS; PRESERVATION; REFLECTIVE COATINGS; ROUGHNESS; SILICON; SPECIFICATIONS; THIN FILMS

Citation Formats

Soufli, R, Baker, S L, Robinson, J C, Gullikson, E M, McCarville, T J, Pivovaroff, M J, Stefan, P, Hau-Riege, S P, and Bionta, R. Morphology, microstructure, stress and damage properties of thin film coatings for the LCLS x-ray mirrors. United States: N. p., 2009. Web. doi:10.1117/12.823836.
Soufli, R, Baker, S L, Robinson, J C, Gullikson, E M, McCarville, T J, Pivovaroff, M J, Stefan, P, Hau-Riege, S P, & Bionta, R. Morphology, microstructure, stress and damage properties of thin film coatings for the LCLS x-ray mirrors. United States. https://doi.org/10.1117/12.823836
Soufli, R, Baker, S L, Robinson, J C, Gullikson, E M, McCarville, T J, Pivovaroff, M J, Stefan, P, Hau-Riege, S P, and Bionta, R. 2009. "Morphology, microstructure, stress and damage properties of thin film coatings for the LCLS x-ray mirrors". United States. https://doi.org/10.1117/12.823836. https://www.osti.gov/servlets/purl/953285.
@article{osti_953285,
title = {Morphology, microstructure, stress and damage properties of thin film coatings for the LCLS x-ray mirrors},
author = {Soufli, R and Baker, S L and Robinson, J C and Gullikson, E M and McCarville, T J and Pivovaroff, M J and Stefan, P and Hau-Riege, S P and Bionta, R},
abstractNote = {The development and properties of reflective coatings for the x-ray offset mirror systems of the Linac Coherent Light Source (LCLS) free-electron laser (FEL) are discussed in this manuscript. The uniquely high instantaneous dose of the LCLS FEL beam translates to strict limits in terms of materials choice, thus leading to an x-ray mirror design consisting of a reflective coating deposited on a silicon substrate. Coherent wavefront preservation requirements for these mirrors result in stringent surface figure and finish specifications. DC-magnetron sputtered B{sub 4}C and SiC thin film coatings with optimized stress, roughness and figure properties for the LCLS x-ray mirrors are presented. The evolution of microstructure, morphology, and stress of these thin films versus deposition conditions is discussed. Experimental results on the performance of these coatings with respect to FEL damage are also presented.},
doi = {10.1117/12.823836},
url = {https://www.osti.gov/biblio/953285}, journal = {},
issn = {0277-786X},
number = ,
volume = 7361,
place = {United States},
year = {Thu Apr 23 00:00:00 EDT 2009},
month = {Thu Apr 23 00:00:00 EDT 2009}
}

Conference:
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