The electrical contact resistance and adhesion of intermixed metal thin-films for use in MEMS contact switches.
Abstract
No abstract prepared.
- Authors:
- Publication Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 948993
- Report Number(s):
- SAND2005-1995C
TRN: US200907%%264
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Conference
- Resource Relation:
- Conference: Proposed for presentation at the 2005 Spring MRS Meeting held March 28-April 1, 2005 in San Francisco, CA.
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; ADHESION; SWITCHES; THIN FILMS; METALS; MICROELECTRONICS; ELECTRIC CONTACTS; ELECTRIC CONDUCTIVITY
Citation Formats
Dugger, Michael Thomas, Vianco, Paul Thomas, Dickrell, Daniel John, III, and Goeke, Ronald S. The electrical contact resistance and adhesion of intermixed metal thin-films for use in MEMS contact switches.. United States: N. p., 2005.
Web.
Dugger, Michael Thomas, Vianco, Paul Thomas, Dickrell, Daniel John, III, & Goeke, Ronald S. The electrical contact resistance and adhesion of intermixed metal thin-films for use in MEMS contact switches.. United States.
Dugger, Michael Thomas, Vianco, Paul Thomas, Dickrell, Daniel John, III, and Goeke, Ronald S. 2005.
"The electrical contact resistance and adhesion of intermixed metal thin-films for use in MEMS contact switches.". United States.
@article{osti_948993,
title = {The electrical contact resistance and adhesion of intermixed metal thin-films for use in MEMS contact switches.},
author = {Dugger, Michael Thomas and Vianco, Paul Thomas and Dickrell, Daniel John, III and Goeke, Ronald S},
abstractNote = {No abstract prepared.},
doi = {},
url = {https://www.osti.gov/biblio/948993},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 01 00:00:00 EST 2005},
month = {Tue Mar 01 00:00:00 EST 2005}
}
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