Automated and integrated mask generation from a CAD constructed 3D model.
We have developed and implemented a method which given a three-dimensional object can infer from topology the two-dimensional masks needed to produce that object with surface micromachining. This design tool calculates the two-dimensional mask set required to produce a given three-dimensional model by investigating the vertical topology to the model. The 3D model is first separated into bodies that are non-intersecting, made from different materials or only linked through a ground plane. Next, for each body unique horizontal cross sections are located and arranged into a tree based on their topological relationship. A branch-wise search of the tree uncovers locations where deposition boundaries must lie and identifies candidate masks creating a generic mask set for the 3D model. Finally, in the last step specific process requirements are considered that may constrain the generic mask set.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 947367
- Report Number(s):
- SAND2005-1335C; TRN: US200909%%73
- Resource Relation:
- Conference: Proposed for presentation at the Nanotech 2005 : Nanoscience and Technology Institute Conference held May 8-12, 2005 in Anaheim, CA.
- Country of Publication:
- United States
- Language:
- English
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