skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: On the use of titanium nitride as structural material for Nano-Electro-Mechanical Systems (NEMS).

Abstract

The introduction of new multifunctional materials provides the potential for expanding the realm of microsystems device design and applications. Titanium nitride is identified as an attractive candidate material for use in NEMS applications given its favorable electrical, mechanical and chemical properties thereby enabling its use in high frequency applications and in harsh environments. We demonstrate TiN NEMS structures and low temperature residual stress control of the TiN comprising those structures. Potential applications of TiN as a NEMS structural material are discussed, with particular emphasis on active nanophotonic devices.

Authors:
 [1];  [1];  [1];  [1];  [1]
  1. (Massachusetts Institute of Technology, Cambridge, MA)
Publication Date:
Research Org.:
Sandia National Laboratories
Sponsoring Org.:
USDOE
OSTI Identifier:
947310
Report Number(s):
SAND2005-1391C
TRN: US200909%%45
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the Fifth IEEE Conference on Nanotechnology held July 11-15, 2005 in Nagoya, Japan
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY; TITANIUM NITRIDES; MICROELECTRONICS; NANOSTRUCTURES; RESIDUAL STRESSES; USES

Citation Formats

Senevirante, Dilan, Nielson, Gregory N., Takahashi, Satoshi, Tuller, Harry L., and Barbastathis, George. On the use of titanium nitride as structural material for Nano-Electro-Mechanical Systems (NEMS).. United States: N. p., 2005. Web.
Senevirante, Dilan, Nielson, Gregory N., Takahashi, Satoshi, Tuller, Harry L., & Barbastathis, George. On the use of titanium nitride as structural material for Nano-Electro-Mechanical Systems (NEMS).. United States.
Senevirante, Dilan, Nielson, Gregory N., Takahashi, Satoshi, Tuller, Harry L., and Barbastathis, George. Tue . "On the use of titanium nitride as structural material for Nano-Electro-Mechanical Systems (NEMS).". United States.
@article{osti_947310,
title = {On the use of titanium nitride as structural material for Nano-Electro-Mechanical Systems (NEMS).},
author = {Senevirante, Dilan and Nielson, Gregory N. and Takahashi, Satoshi and Tuller, Harry L. and Barbastathis, George},
abstractNote = {The introduction of new multifunctional materials provides the potential for expanding the realm of microsystems device design and applications. Titanium nitride is identified as an attractive candidate material for use in NEMS applications given its favorable electrical, mechanical and chemical properties thereby enabling its use in high frequency applications and in harsh environments. We demonstrate TiN NEMS structures and low temperature residual stress control of the TiN comprising those structures. Potential applications of TiN as a NEMS structural material are discussed, with particular emphasis on active nanophotonic devices.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2005},
month = {3}
}

Conference:
Other availability
Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.

Save / Share: