skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems.

Abstract

Most current micro/nanoelectromechanical systems (MEMS/NEMS) are based on silicon. However, silicon exhibits relatively poor mechanical/tribological properties, compromising applications to some devices. Diamond films with superior mechanical/tribological properties provide an excellent alternative platform material. Ultrananocrystalline diamond (UNCD{reg_sign}) in film form with 2-5 nm grains exhibits excellent properties for high-performance MEMS/NEMS devices. Concurrently, piezoelectric Pb(Zr{sub x}Ti{sub 1-x})O{sub 3} (PZT) films provide high sensitivity/low electrical noise for sensing/high-force actuation at relatively low voltages. Therefore, integration of PZT and UNCD films provides a high-performance platform for advanced MEMS/NEMS devices. This letter describes the bases of such integration and demonstration of low voltage piezoactuated hybrid PZT/UNCD cantilevers.

Authors:
; ; ;
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
940701
Report Number(s):
ANL/MSD/JA-57796
Journal ID: ISSN 0003-6951; APPLAB; TRN: US200824%%177
DOE Contract Number:  
DE-AC02-06CH11357
Resource Type:
Journal Article
Resource Relation:
Journal Name: Appl. Phys. Lett.; Journal Volume: 90; Journal Issue: 2007
Country of Publication:
United States
Language:
ENGLISH
Subject:
36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY; DIAMONDS; MICROELECTRONICS; NANOSTRUCTURES; PIEZOELECTRICITY; PZT

Citation Formats

Srinivasan, S., Hiller, J., Kabius, B., and Auciello, O. Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems.. United States: N. p., 2007. Web. doi:10.1063/1.2679209.
Srinivasan, S., Hiller, J., Kabius, B., & Auciello, O. Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems.. United States. doi:10.1063/1.2679209.
Srinivasan, S., Hiller, J., Kabius, B., and Auciello, O. Mon . "Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems.". United States. doi:10.1063/1.2679209.
@article{osti_940701,
title = {Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems.},
author = {Srinivasan, S. and Hiller, J. and Kabius, B. and Auciello, O.},
abstractNote = {Most current micro/nanoelectromechanical systems (MEMS/NEMS) are based on silicon. However, silicon exhibits relatively poor mechanical/tribological properties, compromising applications to some devices. Diamond films with superior mechanical/tribological properties provide an excellent alternative platform material. Ultrananocrystalline diamond (UNCD{reg_sign}) in film form with 2-5 nm grains exhibits excellent properties for high-performance MEMS/NEMS devices. Concurrently, piezoelectric Pb(Zr{sub x}Ti{sub 1-x})O{sub 3} (PZT) films provide high sensitivity/low electrical noise for sensing/high-force actuation at relatively low voltages. Therefore, integration of PZT and UNCD films provides a high-performance platform for advanced MEMS/NEMS devices. This letter describes the bases of such integration and demonstration of low voltage piezoactuated hybrid PZT/UNCD cantilevers.},
doi = {10.1063/1.2679209},
journal = {Appl. Phys. Lett.},
number = 2007,
volume = 90,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2007},
month = {Mon Jan 01 00:00:00 EST 2007}
}