Ti/Al/Ti/Au and V/Al/V/Au contacts to Plasma-etched n-Al0.58Ga0.42N.
Journal Article
·
· Proposed for publication in Journal of Electronic Materials.
OSTI ID:940533
- The Pennsylvania State University, University Park, PA
- Changwon National University, Changwon, Gyeongnam 641-773, Korea
No abstract prepared.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 940533
- Report Number(s):
- SAND2008-0924J; TRN: US200824%%7
- Journal Information:
- Proposed for publication in Journal of Electronic Materials., Journal Name: Proposed for publication in Journal of Electronic Materials.
- Country of Publication:
- United States
- Language:
- English
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