Progress in Large Period Multilayer Coatings for High Harmonic and Solar Applications
Multilayer coatings for normal incidence optics designed for the long wavelength region (25 nm < {lambda} < 50 nm) are particularly challenging due to the few number of layers that can be utilized in the reflection. Recently, Mg/SiC multilayers have been fabricated with normal incidence reflectivity in the vicinity of 40% for wavelengths near the He-II line at 30.4 nm. Motivated by this success we have investigated the use of a tri-band multilayer to increase the bandwidth while maintaining the reflectivity. The multilayers were deposited by conventional magnetron sputtering. Using Mg/SiC bilayers a reflectivity of 45% was achieved at 27 to 32 nm at an angle of 5 deg from normal. The Mg/Sc/SiC multilayer systems have also been investigated. It obtained a near normal incidence reflectivity of 35% while increasing the bandwidth by a factor of 2. These results are very encouraging for the possibility of more widespread applications of normal incidence optics in high harmonic applications.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- Materials Sciences Division
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 936524
- Report Number(s):
- LBNL-847E-Ext-Abs; TRN: US200818%%839
- Resource Relation:
- Conference: Physics of X-ray Multilayer Structures, Montana, Feb. 3-7, 2008
- Country of Publication:
- United States
- Language:
- English
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