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Title: Proposal for a Universal Test Mirror for Characterization of SlopeMeasuring Instruments

Abstract

The development of third generation light sources like theAdvanced Light Source (ALS) or BESSY II brought to a focus the need forhigh performance synchrotron optics with unprecedented tolerances forslope error and micro roughness. Proposed beam lines at Free ElectronLasers (FEL) require optical elements up to a length of one meter,characterized by a residual slope error in the range of 0.1murad (rms),and rms values of 0.1 nm for micro roughness. These optical elements mustbe inspected by highly accurate measuring instruments, providing ameasurement uncertainty lower than the specified accuracy of the surfaceunder test. It is essential that metrology devices in use at synchrotronlaboratories be precisely characterized and calibrated to achieve thistarget. In this paper we discuss a proposal for a Universal Test Mirror(UTM) as a realization of a high performance calibration instrument. Theinstrument would provide an ideal calibration surface to replicate aredundant surface under test of redundant figure. The application of asophisticated calibration instrument will allow the elimination of themajority of the systematic error from the error budget of an individualmeasurement of a particular optical element. We present the limitationsof existing methods, initial UTM design considerations, possiblecalibration algorithms, and an estimation of the expectedaccuracy.

Authors:
; ; ; ; ; ;
Publication Date:
Research Org.:
Ernest Orlando Lawrence Berkeley NationalLaboratory, Berkeley, CA (US); Advanced Light Source(ALS)
Sponsoring Org.:
USDOE Director. Office of Science. Basic EnergySciences
OSTI Identifier:
932789
Report Number(s):
LBNL-62509
R&D Project: 458117; BnR: KC0204016; TRN: US0803657
DOE Contract Number:  
DE-AC02-05CH11231
Resource Type:
Conference
Resource Relation:
Conference: SPIE Optics and Photonics 2007, San Diego, CA,August 26-30, 2007
Country of Publication:
United States
Language:
English
Subject:
47; 42; ACCURACY; ADVANCED LIGHT SOURCE; ALGORITHMS; CALIBRATION; DESIGN; FREE ELECTRON LASERS; LIGHT SOURCES; MEASURING INSTRUMENTS; MIRRORS; OPTICS; PERFORMANCE; ROUGHNESS; SYNCHROTRONS; slope measuring instrument long trace profiler LTP calibrationsystematic error reduction test mirror

Citation Formats

Yashchuk, Valeriy V., McKinney, Wayne R., Warwick, Tony, Noll,Tino, Siewert, Frank, Zeschke, Thomas, and Geckeler, Ralf D.. Proposal for a Universal Test Mirror for Characterization of SlopeMeasuring Instruments. United States: N. p., 2007. Web.
Yashchuk, Valeriy V., McKinney, Wayne R., Warwick, Tony, Noll,Tino, Siewert, Frank, Zeschke, Thomas, & Geckeler, Ralf D.. Proposal for a Universal Test Mirror for Characterization of SlopeMeasuring Instruments. United States.
Yashchuk, Valeriy V., McKinney, Wayne R., Warwick, Tony, Noll,Tino, Siewert, Frank, Zeschke, Thomas, and Geckeler, Ralf D.. Tue . "Proposal for a Universal Test Mirror for Characterization of SlopeMeasuring Instruments". United States. doi:. https://www.osti.gov/servlets/purl/932789.
@article{osti_932789,
title = {Proposal for a Universal Test Mirror for Characterization of SlopeMeasuring Instruments},
author = {Yashchuk, Valeriy V. and McKinney, Wayne R. and Warwick, Tony and Noll,Tino and Siewert, Frank and Zeschke, Thomas and Geckeler, Ralf D.},
abstractNote = {The development of third generation light sources like theAdvanced Light Source (ALS) or BESSY II brought to a focus the need forhigh performance synchrotron optics with unprecedented tolerances forslope error and micro roughness. Proposed beam lines at Free ElectronLasers (FEL) require optical elements up to a length of one meter,characterized by a residual slope error in the range of 0.1murad (rms),and rms values of 0.1 nm for micro roughness. These optical elements mustbe inspected by highly accurate measuring instruments, providing ameasurement uncertainty lower than the specified accuracy of the surfaceunder test. It is essential that metrology devices in use at synchrotronlaboratories be precisely characterized and calibrated to achieve thistarget. In this paper we discuss a proposal for a Universal Test Mirror(UTM) as a realization of a high performance calibration instrument. Theinstrument would provide an ideal calibration surface to replicate aredundant surface under test of redundant figure. The application of asophisticated calibration instrument will allow the elimination of themajority of the systematic error from the error budget of an individualmeasurement of a particular optical element. We present the limitationsof existing methods, initial UTM design considerations, possiblecalibration algorithms, and an estimation of the expectedaccuracy.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jul 31 00:00:00 EDT 2007},
month = {Tue Jul 31 00:00:00 EDT 2007}
}

Conference:
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