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Title: Precision mechanical design for a hard x-ray nanoprobe instrument with active vibration control in nanometer scale.

Abstract

No abstract prepared.

Authors:
; ; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
932430
Report Number(s):
ANL/XFD/CP-115857
TRN: US200813%%7
DOE Contract Number:
DE-AC02-06CH11357
Resource Type:
Conference
Resource Relation:
Conference: (XRM2005) 8th International Conference on X-ray Microscopy; Jul 26-30, 2005; Egret Himeji, Japan
Country of Publication:
United States
Language:
ENGLISH
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; 99 GENERAL AND MISCELLANEOUS//MATHEMATICS, COMPUTING, AND INFORMATION SCIENCE; ACCURACY; DESIGN; X-RAY EQUIPMENT; NANOSTRUCTURES; MECHANICAL VIBRATIONS; MITIGATION; HARD X RADIATION

Citation Formats

Shu, D., Maser, J., Lai, B., Vogt, S., Holt, M., Preissner, C., Smolyanitskiy, A., Tieman, B., Winarski, R., Stephenson, G. B., and Illinois Inst. of Tech. Precision mechanical design for a hard x-ray nanoprobe instrument with active vibration control in nanometer scale.. United States: N. p., 2007. Web.
Shu, D., Maser, J., Lai, B., Vogt, S., Holt, M., Preissner, C., Smolyanitskiy, A., Tieman, B., Winarski, R., Stephenson, G. B., & Illinois Inst. of Tech. Precision mechanical design for a hard x-ray nanoprobe instrument with active vibration control in nanometer scale.. United States.
Shu, D., Maser, J., Lai, B., Vogt, S., Holt, M., Preissner, C., Smolyanitskiy, A., Tieman, B., Winarski, R., Stephenson, G. B., and Illinois Inst. of Tech. Mon . "Precision mechanical design for a hard x-ray nanoprobe instrument with active vibration control in nanometer scale.". United States. doi:.
@article{osti_932430,
title = {Precision mechanical design for a hard x-ray nanoprobe instrument with active vibration control in nanometer scale.},
author = {Shu, D. and Maser, J. and Lai, B. and Vogt, S. and Holt, M. and Preissner, C. and Smolyanitskiy, A. and Tieman, B. and Winarski, R. and Stephenson, G. B. and Illinois Inst. of Tech.},
abstractNote = {No abstract prepared.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2007},
month = {Mon Jan 01 00:00:00 EST 2007}
}

Conference:
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  • We are developing a new hard x-ray nanoprobe instrument that is one of the centerpieces of the characterization facilities of the Center for Nanoscale Materials being constructed at Argonne National Laboratory. This new probe will cover an energy range of 3-30 keV with 30-nm spatial resolution. The system is designed to accommodate x-ray optics with a resolution limit of 10 nm, therefore, it requires staging of x-ray optics and specimens with a mechanical repeatability of better than 5 nm. Fast feedback for differential vibration control between the zone-plate x-ray optics and the sample holder has been implemented in the designmore » using a digital-signal-processor-based real-time closed-loop feedback technique. A specially designed, custom-built laser Doppler displacement meter system provides two-dimensional differential displacement measurements with subnanometer resolution between the zone-plate x-ray optics and the sample holder. The optomechanical design of the instrument positioning stage system with nanometer-scale active vibration control is presented in this paper.« less
  • We are developing a new hard x-ray nanoprobe instrument that is one of the centerpieces of the characterization facilities of the Center for Nanoscale Materials being constructed at Argonne National Laboratory. This new probe will cover an energy range of 3-30 keV with 30-nm spacial resolution. The system is designed to accommodate x-ray optics with a resolution limit of 10 nm, therefore, it requires staging of x-ray optics and specimens with a mechanical repeatability of better than 5 nm. Fast feedback for differential vibration control between the zone-plate x-ray optics and the sample holder has been implemented in the designmore » using a digital-signal-processor-based real-time closed-loop feedback technique. A specially designed, custom-built laser Doppler displacement meter system provides two-dimensional differential displacement measurements with subnanometer resolution between the zone-plate x-ray optics and the sample holder. The optomechanical design of the instrument positioning stage system with nanometer-scale active vibration control is presented in this paper.« less
  • An enhanced mechanical design of multiple zone plates precision alignment apparatus for hard x-ray focusing in a twenty-nanometer scale is provided. The precision alignment apparatus includes a zone plate alignment base frame; a plurality of zone plates; and a plurality of zone plate holders, each said zone plate holder for mounting and aligning a respective zone plate for hard x-ray focusing. At least one respective positioning stage drives and positions each respective zone plate holder. Each respective positioning stage is mounted on the zone plate alignment base frame. A respective linkage component connects each respective positioning stage and the respectivemore » zone plate holder. The zone plate alignment base frame, each zone plate holder and each linkage component is formed of a selected material for providing thermal expansion stability and positioning stability for the precision alignment apparatus.« less
  • This paper presents the design of a robot-based detector manipulator for microdiffraction applications with a hard X-ray nanoprobe instrument system being constructed at the Advanced Photon Source (APS) for the Center for Nanoscale Materials (CNM) being constructed at Argonne National Laboratory (ANL). Applications for detectors weighing from 1.5 to 100 kg were discussed in three configurations.
  • The Hard X-ray Nanoprobe (HXN) Beamline of National Synchrotron Light Source II (NSLS-lI) requires high levels of stability in order to achieve the desired instrument resolution. To ensure that the design of the endstation helps meet the stringent criteria and that natural and cultural vibration is mitigated both passively and actively, a comprehensive study complimentary to the design process has been undertaken. Vibration sources that have the potential to disrupt sensitive experiments such as wind, traffic and NSLS II operating systems have been studied using state of the art simulations and an array of field data. Further, final stage vibrationmore » isolation principles have been explored in order to be utilized in supporting endstation instruments. This paper presents results of the various study aspects and their influence on the HXN design optimization.« less