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Title: Atom probe specimen preparation with a dual beam SEM/FIB miller

Authors:
 [1];  [1]
  1. ORNL
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); Shared Research Equipment Collaborative Research Center
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
931455
DOE Contract Number:
DE-AC05-00OR22725
Resource Type:
Journal Article
Resource Relation:
Journal Name: Ultramicroscopy; Journal Volume: 107
Country of Publication:
United States
Language:
English

Citation Formats

Miller, Michael K, and Russell, Kaye F. Atom probe specimen preparation with a dual beam SEM/FIB miller. United States: N. p., 2007. Web. doi:10.1016/j.ultramic.2007.02.023.
Miller, Michael K, & Russell, Kaye F. Atom probe specimen preparation with a dual beam SEM/FIB miller. United States. doi:10.1016/j.ultramic.2007.02.023.
Miller, Michael K, and Russell, Kaye F. Mon . "Atom probe specimen preparation with a dual beam SEM/FIB miller". United States. doi:10.1016/j.ultramic.2007.02.023.
@article{osti_931455,
title = {Atom probe specimen preparation with a dual beam SEM/FIB miller},
author = {Miller, Michael K and Russell, Kaye F},
abstractNote = {},
doi = {10.1016/j.ultramic.2007.02.023},
journal = {Ultramicroscopy},
number = ,
volume = 107,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2007},
month = {Mon Jan 01 00:00:00 EST 2007}
}
  • No abstract prepared.
  • No abstract prepared.
  • Preparing high-quality transmission electron microscopy (TEM) specimens is of paramount importance in TEM studies. The development of the focused ion beam (FIB) microscope has greatly enhanced TEM specimen preparation capabilities. In recent years, various FIB-TEM foil preparation techniques have been developed. However, the currently available techniques fail to produce TEM specimens from fragile and ultra-fine specimens such as fine fibers. In this paper, the conventional FIB-TEM specimen preparation techniques are reviewed, and their advantages and shortcomings are compared. In addition, a new technique suitable to prepare TEM samples from ultra-fine specimens is demonstrated.
  • A recent emergence of a cross-beam scanning electron microscopy (SEM)/focused-ion-beam (FIB) system have given choice to fabricate cross-sectional transmission electron microscopy (TEM) specimen of thin film multilayer sample. A 300 layer pair thin film multilayer sample of W/B{sub 4}C was used to demonstrate the specimen lift-out technique in very short time as compared to conventional cross-sectional sample preparation technique. To get large area electron transparent sample, sample prepared by FIB is followed by Ar{sup +} ion polishing at 2 kV with grazing incident. The prepared cross-sectional sample was characterized by transmission electron microscope.
  • No abstract prepared.