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Title: Quantitative Amplitude and Phase Contrast Imaging in a Scanning Transmission X-ray Microscope

Authors:
; ;
Publication Date:
Research Org.:
Brookhaven National Laboratory (BNL) National Synchrotron Light Source
Sponsoring Org.:
Doe - Office Of Science
OSTI Identifier:
930348
Report Number(s):
BNL-81063-2008-JA
DOE Contract Number:
DE-AC02-98CH10886
Resource Type:
Journal Article
Resource Relation:
Journal Name: Ultramicroscopy; Journal Volume: 107; Journal Issue: 8
Country of Publication:
United States
Language:
English
Subject:
national synchrotron light source

Citation Formats

Hornberger,B., Feser, M., and Jacobsen, C. Quantitative Amplitude and Phase Contrast Imaging in a Scanning Transmission X-ray Microscope. United States: N. p., 2007. Web. doi:10.1016/j.ultramic.2006.12.006.
Hornberger,B., Feser, M., & Jacobsen, C. Quantitative Amplitude and Phase Contrast Imaging in a Scanning Transmission X-ray Microscope. United States. doi:10.1016/j.ultramic.2006.12.006.
Hornberger,B., Feser, M., and Jacobsen, C. Mon . "Quantitative Amplitude and Phase Contrast Imaging in a Scanning Transmission X-ray Microscope". United States. doi:10.1016/j.ultramic.2006.12.006.
@article{osti_930348,
title = {Quantitative Amplitude and Phase Contrast Imaging in a Scanning Transmission X-ray Microscope},
author = {Hornberger,B. and Feser, M. and Jacobsen, C.},
abstractNote = {},
doi = {10.1016/j.ultramic.2006.12.006},
journal = {Ultramicroscopy},
number = 8,
volume = 107,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2007},
month = {Mon Jan 01 00:00:00 EST 2007}
}
  • We obtain quantitative phase reconstructions from differential phase contrast images obtained with a scanning transmission x-ray microscope and 2.5 keV x rays. The theoretical basis of the technique is presented along with measurements and their interpretation.
  • We obtain quantitative phase reconstructions from differential phase contrast images obtained with a scanning transmission x-ray microscope and 2.5 keV x rays. The theoretical basis of the technique is presented along with measurements and their interpretation.
  • An energy-tunable transmission hard x-ray microscope with close to 60 nm spatial resolution in three dimensions (3D) has been developed. With a cone beam illumination, a zone plate of 50 nm outmost zone width, a stable mechanical design, and software feedback, we obtained tomographic data sets that are close to 60 nm spatial resolution. Meanwhile, the element specific imaging was also obtained by a differential absorption contrast technique used below and above the absorption of the element. Examples of advanced intergraded circuit devices are used to demonstrate the element selectivity and spatial resolution in 3D of the microscope.
  • A set of GaAs{sub 1−x}Bi{sub x}/GaAs multilayer quantum-well structures was deposited by metal-organic vapor phase epitaxy at 390 °C and 420 °C. The precursor fluxes were introduced with the intent of growing discrete and compositionally uniform GaAs{sub 1−x}Bi{sub x} well and GaAs barrier layers in the epitaxial films. High-resolution high-angle annular-dark-field (or “Z-contrast”) scanning transmission electron microscopy imaging revealed concentration profiles that were periodic in the growth direction, but far more complicated in shape than the intended square wave. The observed composition profiles could explain various reports of physical properties measurements that suggest compositional inhomogeneity in GaAs{sub 1−x}Bi{sub x} alloys as theymore » currently are grown.« less
  • Differential phase-contrast scanning x-ray microscope/microtomography have been developed. A fast readout charge-coupled device (CCD) camera coupled with a visible-light conversion unit is used as a detector to record the transmitted intensity distribution of far-field image for every pixel in a scan. Simultaneous absorption and phase-contrast images are given from a single scan by image-processing of the CCD frames. The system is constructed at BL20XU of SPring-8, and its feasibility is demonstrated at the photon energy of 8 keV. A tantalum test chart is observed and its finest structure of 140 nm pitch pattern is clearly observed. Measured phase sensitivity ismore » approximately {lambda}/270. Some low-Z element specimens are observed and obtained phase contrast image shows much higher sensitivity than that of absorption contrast.« less