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Title: High-Resolution X-ray Topography of Dislocations in 4H-SiC Epilayers

Abstract

Synchrotron x-ray topography with a high-resolution setup using 11{sup -}{sub 2}8 reflection was carried out on 4H-SiC epilayers. Four different shapes of threading-edge dislocation according to Burgers vector direction were observed. The four types of threading-edge dislocation images were calculated by computer simulation, and the experimental results correlated well with the simulation results. The detailed topographic features generated by plural screw dislocations and basal plane dislocations were also investigated.

Authors:
; ; ;
Publication Date:
Research Org.:
Brookhaven National Laboratory (BNL) National Synchrotron Light Source
Sponsoring Org.:
Doe - Office Of Science
OSTI Identifier:
930050
Report Number(s):
BNL-80675-2008-JA
Journal ID: ISSN 0884-2914; JMREEE; TRN: US0806693
DOE Contract Number:
DE-AC02-98CH10886
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Materials Research; Journal Volume: 22
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; BURGERS VECTOR; COMPUTERIZED SIMULATION; DISLOCATIONS; IMAGES; REFLECTION; SCREW DISLOCATIONS; SIMULATION; SYNCHROTRONS; TOPOGRAPHY; national synchrotron light source

Citation Formats

Kamata,I., Tsuchida, H., Vetter, W., and Dudley, M. High-Resolution X-ray Topography of Dislocations in 4H-SiC Epilayers. United States: N. p., 2007. Web. doi:10.1557/jmr.2007.0132.
Kamata,I., Tsuchida, H., Vetter, W., & Dudley, M. High-Resolution X-ray Topography of Dislocations in 4H-SiC Epilayers. United States. doi:10.1557/jmr.2007.0132.
Kamata,I., Tsuchida, H., Vetter, W., and Dudley, M. Mon . "High-Resolution X-ray Topography of Dislocations in 4H-SiC Epilayers". United States. doi:10.1557/jmr.2007.0132.
@article{osti_930050,
title = {High-Resolution X-ray Topography of Dislocations in 4H-SiC Epilayers},
author = {Kamata,I. and Tsuchida, H. and Vetter, W. and Dudley, M.},
abstractNote = {Synchrotron x-ray topography with a high-resolution setup using 11{sup -}{sub 2}8 reflection was carried out on 4H-SiC epilayers. Four different shapes of threading-edge dislocation according to Burgers vector direction were observed. The four types of threading-edge dislocation images were calculated by computer simulation, and the experimental results correlated well with the simulation results. The detailed topographic features generated by plural screw dislocations and basal plane dislocations were also investigated.},
doi = {10.1557/jmr.2007.0132},
journal = {Journal of Materials Research},
number = ,
volume = 22,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2007},
month = {Mon Jan 01 00:00:00 EST 2007}
}