Optimization of Conductivity and Transparency in Amorphous In-Zn-O Transparent Conductors: Preprint

Conference · Thu May 01 00:00:00 EDT 2008

DOI:https://doi.org/10.1109/PVSC.2008.4922778· OSTI ID:929609

Perkins, J; Berry, J; van Hest, M; Alleman, J; Dabney, M; Gedvilas, L; Ginley, D S; Leenheer, A; O'Hayre, R

Amorphous mixed metal oxide TCOs are of increasing interest due to the excellent opto-electronic properties and smoothness (RRMS < 0.5 nm) obtained for sputtered films deposited at less than 100 ..deg..C. Here, we have investigated the combined materials phase space of oxygen stoichiometry and metals composition (In:Zn ratio) and made two key discoveries.

• Research Organization: National Renewable Energy Lab. (NREL), Golden, CO (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC36-99-GO10337
• OSTI ID: 929609
• Report Number(s): NREL/CP-520-42546; TRN: US200813%%259
• Resource Relation: Conference: Presented at the 33rd IEEE Photovoltaic Specialists Conference, 11-16 May 2008, San Diego, California
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
36 MATERIALS SCIENCE
OPTIMIZATION
OXIDES
OXYGEN
PHASE SPACE
ROUGHNESS
STOICHIOMETRY
PV
AMORPHOUS SILICON
TRANSPARENT CONDUCTING OXIDES
ELECTRICAL CONTACTS
ANTIREFLECFTION COATINGS
CHEMICAL BARRIERS
X-RAY DIFFRACTION
THIN FILM
Solar Energy - Photovoltaics