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Title: Experiments with planar inductive ion source meant for creation ofH+ Beams

Abstract

In this article the effect of different engineering parameters of an rf-driven ion sources with external spiral antenna and quartz disk rf-window are studied. Paper consists of three main topics: The effect of source geometry on the operation gas pressure, the effect of source materials and magnetic confinement on extracted current density and ion species and the effect of different antenna geometries on the extracted current density. The operation gas pressure as a function of the plasma chamber diameter, was studied. This was done with three cylindrical plasma chambers with different inner diameters. The chamber materials were studied using two materials, aluminum and alumina (AlO{sub 2}). The removable 14 magnet multicusp confinement arrangement enabled us to compare the effects of the two wall materials with and without the magnetic confinement. Highest proton fraction of {approx} 8% at 2000 W of rf-power and at pressure of 1.3 Pa was measured using AlO{sub 2} plasma chamber and no multicusp confinement. For all the compared ion sources at 1000W of rf-power, source with multicusp confinement and AlO2 plasma chamber yields highest current density of 82.7 mA/cm{sup 2} at operation pressure of 4 Pa. From the same source highest measured current density of 143more » mA/cm{sup 2} at 1.3 Pa and 2200W of rf-power was achieved. Multicusp confinement increased the maximum extracted current up to factor of two. Plasma production with different antenna geometries was also studied. Antenna tests were performed using same source geometry as in source material study with AlO{sub 2} plasma chamber and multicusp confinement. The highest current density was achieved with 4.5 loop solenoid antenna with 6 cm diameter. Slightly lower current density with lower pressure was achieved using tightly wound 3 loop spiral antenna with 3.3 cm ID and 6 cm OD.« less

Authors:
; ; ;
Publication Date:
Research Org.:
Ernest Orlando Lawrence Berkeley NationalLaboratory, Berkeley, CA (US)
Sponsoring Org.:
USDOE
OSTI Identifier:
928770
Report Number(s):
LBNL-61784
Journal ID: ISSN 0034-6748; RSINAK; R&D Project: Z2IS10 Z2IS14; TRN: US0803256
DOE Contract Number:  
DE-AC02-05CH11231
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 78; Journal Issue: 6; Related Information: Journal Publication Date: 06/2007
Country of Publication:
United States
Language:
English
Subject:
70; ALUMINIUM; ANTENNAS; CONFINEMENT; CURRENT DENSITY; GEOMETRY; ION SOURCES; MAGNETIC CONFINEMENT; MAGNETS; PLASMA PRODUCTION; PROTONS; QUARTZ; SOLENOIDS; Ion Source External RF-antenna Planar inductive source Plasmasource

Citation Formats

Vainionpaa, J.H., Kalvas, T., Hahto, S.K., and Reijonen, J. Experiments with planar inductive ion source meant for creation ofH+ Beams. United States: N. p., 2007. Web. doi:10.1063/1.2742624.
Vainionpaa, J.H., Kalvas, T., Hahto, S.K., & Reijonen, J. Experiments with planar inductive ion source meant for creation ofH+ Beams. United States. doi:10.1063/1.2742624.
Vainionpaa, J.H., Kalvas, T., Hahto, S.K., and Reijonen, J. Wed . "Experiments with planar inductive ion source meant for creation ofH+ Beams". United States. doi:10.1063/1.2742624. https://www.osti.gov/servlets/purl/928770.
@article{osti_928770,
title = {Experiments with planar inductive ion source meant for creation ofH+ Beams},
author = {Vainionpaa, J.H. and Kalvas, T. and Hahto, S.K. and Reijonen, J.},
abstractNote = {In this article the effect of different engineering parameters of an rf-driven ion sources with external spiral antenna and quartz disk rf-window are studied. Paper consists of three main topics: The effect of source geometry on the operation gas pressure, the effect of source materials and magnetic confinement on extracted current density and ion species and the effect of different antenna geometries on the extracted current density. The operation gas pressure as a function of the plasma chamber diameter, was studied. This was done with three cylindrical plasma chambers with different inner diameters. The chamber materials were studied using two materials, aluminum and alumina (AlO{sub 2}). The removable 14 magnet multicusp confinement arrangement enabled us to compare the effects of the two wall materials with and without the magnetic confinement. Highest proton fraction of {approx} 8% at 2000 W of rf-power and at pressure of 1.3 Pa was measured using AlO{sub 2} plasma chamber and no multicusp confinement. For all the compared ion sources at 1000W of rf-power, source with multicusp confinement and AlO2 plasma chamber yields highest current density of 82.7 mA/cm{sup 2} at operation pressure of 4 Pa. From the same source highest measured current density of 143 mA/cm{sup 2} at 1.3 Pa and 2200W of rf-power was achieved. Multicusp confinement increased the maximum extracted current up to factor of two. Plasma production with different antenna geometries was also studied. Antenna tests were performed using same source geometry as in source material study with AlO{sub 2} plasma chamber and multicusp confinement. The highest current density was achieved with 4.5 loop solenoid antenna with 6 cm diameter. Slightly lower current density with lower pressure was achieved using tightly wound 3 loop spiral antenna with 3.3 cm ID and 6 cm OD.},
doi = {10.1063/1.2742624},
journal = {Review of Scientific Instruments},
number = 6,
volume = 78,
place = {United States},
year = {Wed Feb 07 00:00:00 EST 2007},
month = {Wed Feb 07 00:00:00 EST 2007}
}