Sub-diffraction-limited multilayer coatings for the 0.3 numericalaperture micro-exposure tool for extreme ultraviolet lithograpy
Journal Article
·
· Applied Optics
OSTI ID:927332
No abstract prepared.
- Research Organization:
- COLLABORATION - Lawrence Livermore NationalLaboratory
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 927332
- Report Number(s):
- LBNL-63113; APOPAI; TRN: US200811%%47
- Journal Information:
- Applied Optics, Vol. 46; Related Information: Journal Publication Date: June 2007; ISSN 0003-6935
- Country of Publication:
- United States
- Language:
- English
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