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Title: A low-energy linear oxygen plasma source

Abstract

A new version of a Constricted Plasma Source is described,characterized by all metal-ceramic construction, a linear slit exit of180 mm length, and cw-operation (typically 50 kHz) at an average power of1.5 kW. The plasma source is here operated with oxygen gas, producingstreaming plasma that contains mainly positive molecular and atomic ions,and to a much lesser degree, negative ions. The maximum total ion currentobtained was about 0.5 A. The fraction of atomic ions reached more than10 percent of all ions when the flow rate was less then 10 sccm O2,corresponding to a chamber pressure of about 0.5 Pa for the selectedpumping speed. The energy distribution functions of the different ionspecies were measured with a combinedmass spectrometer and energyanalyzer. The time-averaged distribution functions were broad and rangedfrom about 30eV to 90 eV at 200 kHz and higher frequencies, while theywere only several eV broad at 50 kHz and lower frequencies, with themaximum located at about 40 eV for the grounded anode case. This maximumwas shifted down to about 7 eV when the anode was floating, indicatingthe important role of the plasma potential for the ion energy for a givensubstrate potential. The source could be scaled to greater length and maybe useful formore » functionalization of surfaces and plasma-assisteddeposition of compound films.« less

Authors:
;
Publication Date:
Research Org.:
Ernest Orlando Lawrence Berkeley NationalLaboratory, Berkeley, CA (US)
Sponsoring Org.:
USDOE. Assistant Secretary for Energy Efficiency andRenewable Energy. Building Technologies
OSTI Identifier:
923013
Report Number(s):
LBNL-62169
Journal ID: ISSN 0034-6748; RSINAK; R&D Project: 677619; TRN: US0801724
DOE Contract Number:  
DE-AC02-05CH11231
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 78; Related Information: Journal Publication Date: 2007
Country of Publication:
United States
Language:
English
Subject:
70; ANIONS; ANODES; ATOMIC IONS; CONSTRUCTION; DEPOSITION; DISTRIBUTION FUNCTIONS; ENERGY SPECTRA; FLOW RATE; MASS SPECTROMETERS; OXYGEN; PLASMA POTENTIAL; PUMPING; SUBSTRATES; VELOCITY; Constricted Plasma Source oxygen plasma ion energy distributionfunctions

Citation Formats

Anders, Andre, and Yushkov, Georgy Yu. A low-energy linear oxygen plasma source. United States: N. p., 2007. Web. doi:10.1063/1.2723753.
Anders, Andre, & Yushkov, Georgy Yu. A low-energy linear oxygen plasma source. United States. doi:10.1063/1.2723753.
Anders, Andre, and Yushkov, Georgy Yu. Mon . "A low-energy linear oxygen plasma source". United States. doi:10.1063/1.2723753. https://www.osti.gov/servlets/purl/923013.
@article{osti_923013,
title = {A low-energy linear oxygen plasma source},
author = {Anders, Andre and Yushkov, Georgy Yu.},
abstractNote = {A new version of a Constricted Plasma Source is described,characterized by all metal-ceramic construction, a linear slit exit of180 mm length, and cw-operation (typically 50 kHz) at an average power of1.5 kW. The plasma source is here operated with oxygen gas, producingstreaming plasma that contains mainly positive molecular and atomic ions,and to a much lesser degree, negative ions. The maximum total ion currentobtained was about 0.5 A. The fraction of atomic ions reached more than10 percent of all ions when the flow rate was less then 10 sccm O2,corresponding to a chamber pressure of about 0.5 Pa for the selectedpumping speed. The energy distribution functions of the different ionspecies were measured with a combinedmass spectrometer and energyanalyzer. The time-averaged distribution functions were broad and rangedfrom about 30eV to 90 eV at 200 kHz and higher frequencies, while theywere only several eV broad at 50 kHz and lower frequencies, with themaximum located at about 40 eV for the grounded anode case. This maximumwas shifted down to about 7 eV when the anode was floating, indicatingthe important role of the plasma potential for the ion energy for a givensubstrate potential. The source could be scaled to greater length and maybe useful for functionalization of surfaces and plasma-assisteddeposition of compound films.},
doi = {10.1063/1.2723753},
journal = {Review of Scientific Instruments},
number = ,
volume = 78,
place = {United States},
year = {Mon Jan 08 00:00:00 EST 2007},
month = {Mon Jan 08 00:00:00 EST 2007}
}