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Title: Molecular beam epitaxy of InN dots on nitrided sapphire

Abstract

A series of self-assembled InN dots are grown by radio frequency (RF) plasma-assisted molecular beam epitaxy (MBE) directly on nitrided sapphire. Initial nitridation of the sapphire substrates at 900 C results in the formation of a rough AlN surface layer, which acts as a very thin buffer layer and facilitates the nucleation of the InN dots according to the Stranski-Krastanow growth mode, with a wetting layer of {approx}0.9 nm. Atomic force microscopy (AFM) reveals that well-confined InN nanoislands with the greatest height/width at half-height ratio of 0.64 can be grown at 460 C. Lower substrate temperatures result in a reduced aspect ratio due to a lower diffusion rate of the In adatoms, whereas the thermal decomposition of InN truncates the growth at T>500 C. The densities of separated dots vary between 1.0 x 10{sup 10} cm{sup -2} and 2.5 x 10{sup 10} cm{sup -2} depending on the growth time. Optical response of the InN dots under laser excitation is studied with apertureless near-field scanning optical microscopy and photoluminescence spectroscopy, although no photoluminescence is observed from these samples. In view of the desirable implementation of InN nanostructures into photonic devices, the results indicate that nitrided sapphire is a suitable substrate formore » growing self-assembled InN nanodots.« less

Authors:
; ; ;
Publication Date:
Research Org.:
Ernest Orlando Lawrence Berkeley NationalLaboratory, Berkeley, CA (US)
Sponsoring Org.:
USDOE Director. Office of Science. Basic Energy Sciences; Swiss National Science Foundation (SNSF)
OSTI Identifier:
922861
Report Number(s):
LBNL-62583
Journal ID: ISSN 0022-0248; JCRGAE; R&D Project: 400101; BnR: KC0203010; TRN: US200804%%1238
DOE Contract Number:
DE-AC02-05CH11231
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Crystal Growth; Journal Volume: 304; Journal Issue: 2; Related Information: Journal Publication Date: 06/15/2007
Country of Publication:
United States
Language:
English
Subject:
36; ASPECT RATIO; ATOMIC FORCE MICROSCOPY; BUFFERS; DIFFUSION; EXCITATION; IMPLEMENTATION; LASERS; MOLECULAR BEAM EPITAXY; NANOSTRUCTURES; NITRIDATION; NUCLEATION; OPTICAL MICROSCOPY; PHOTOLUMINESCENCE; PYROLYSIS; SAPPHIRE; SPECTROSCOPY; SUBSTRATES

Citation Formats

Romanyuk, Yaroslav E., Dengel, Radu-Gabriel, Stebounova, LarissaV., and Leone, Stephen R. Molecular beam epitaxy of InN dots on nitrided sapphire. United States: N. p., 2007. Web. doi:10.1016/j.jcrysgro.2007.01.048.
Romanyuk, Yaroslav E., Dengel, Radu-Gabriel, Stebounova, LarissaV., & Leone, Stephen R. Molecular beam epitaxy of InN dots on nitrided sapphire. United States. doi:10.1016/j.jcrysgro.2007.01.048.
Romanyuk, Yaroslav E., Dengel, Radu-Gabriel, Stebounova, LarissaV., and Leone, Stephen R. Fri . "Molecular beam epitaxy of InN dots on nitrided sapphire". United States. doi:10.1016/j.jcrysgro.2007.01.048. https://www.osti.gov/servlets/purl/922861.
@article{osti_922861,
title = {Molecular beam epitaxy of InN dots on nitrided sapphire},
author = {Romanyuk, Yaroslav E. and Dengel, Radu-Gabriel and Stebounova, LarissaV. and Leone, Stephen R.},
abstractNote = {A series of self-assembled InN dots are grown by radio frequency (RF) plasma-assisted molecular beam epitaxy (MBE) directly on nitrided sapphire. Initial nitridation of the sapphire substrates at 900 C results in the formation of a rough AlN surface layer, which acts as a very thin buffer layer and facilitates the nucleation of the InN dots according to the Stranski-Krastanow growth mode, with a wetting layer of {approx}0.9 nm. Atomic force microscopy (AFM) reveals that well-confined InN nanoislands with the greatest height/width at half-height ratio of 0.64 can be grown at 460 C. Lower substrate temperatures result in a reduced aspect ratio due to a lower diffusion rate of the In adatoms, whereas the thermal decomposition of InN truncates the growth at T>500 C. The densities of separated dots vary between 1.0 x 10{sup 10} cm{sup -2} and 2.5 x 10{sup 10} cm{sup -2} depending on the growth time. Optical response of the InN dots under laser excitation is studied with apertureless near-field scanning optical microscopy and photoluminescence spectroscopy, although no photoluminescence is observed from these samples. In view of the desirable implementation of InN nanostructures into photonic devices, the results indicate that nitrided sapphire is a suitable substrate for growing self-assembled InN nanodots.},
doi = {10.1016/j.jcrysgro.2007.01.048},
journal = {Journal of Crystal Growth},
number = 2,
volume = 304,
place = {United States},
year = {Fri Apr 20 00:00:00 EDT 2007},
month = {Fri Apr 20 00:00:00 EDT 2007}
}