Microelectromechanical systems contact stress sensor
Abstract
A microelectromechanical systems stress sensor comprising a microelectromechanical systems silicon body. A recess is formed in the silicon body. A silicon element extends into the recess. The silicon element has limited freedom of movement within the recess. An electrical circuit in the silicon element includes a piezoresistor material that allows for sensing changes in resistance that is proportional to bending of the silicon element.
- Inventors:
-
- Oakland, CA
- Publication Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 921497
- Patent Number(s):
- 7,311,009
- Application Number:
- 11/143,543
- Assignee:
- Lawrence Livermore National Security, LLC (Livermore, CA)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Kotovsky, Jack. Microelectromechanical systems contact stress sensor. United States: N. p., 2007.
Web.
Kotovsky, Jack. Microelectromechanical systems contact stress sensor. United States.
Kotovsky, Jack. 2007.
"Microelectromechanical systems contact stress sensor". United States. https://www.osti.gov/servlets/purl/921497.
@article{osti_921497,
title = {Microelectromechanical systems contact stress sensor},
author = {Kotovsky, Jack},
abstractNote = {A microelectromechanical systems stress sensor comprising a microelectromechanical systems silicon body. A recess is formed in the silicon body. A silicon element extends into the recess. The silicon element has limited freedom of movement within the recess. An electrical circuit in the silicon element includes a piezoresistor material that allows for sensing changes in resistance that is proportional to bending of the silicon element.},
doi = {},
url = {https://www.osti.gov/biblio/921497},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 25 00:00:00 EST 2007},
month = {Tue Dec 25 00:00:00 EST 2007}
}
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