Two-wavelength spatial-heterodyne holography

Hanson, Gregory R; Bingham, Philip R; Simpson, John T; Karnowski, Thomas P; Voelkl, Edgar

Two-wavelength spatial-heterodyne holography

Patent · 24 December 2007

OSTI ID:921481

Hanson, Gregory R ^[1]; Bingham, Philip R ^[2]; Simpson, John T ^[2]; Karnowski, Thomas P ^[2]; Voelkl, Edgar ^[3]

Clinton, TN
Knoxville, TN
Austin, TX

Systems and methods are described for obtaining two-wavelength differential-phase holograms. A method includes determining a difference between a filtered analyzed recorded first spatially heterodyne hologram phase and a filtered analyzed recorded second spatially-heterodyned hologram phase.

View Patent

Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN

Sponsoring Organization:: United States Department of Energy

DOE Contract Number:: AC05-00OR22725

Assignee:: UT-Battelle LLC (Oak Ridge, TN)

Patent Number(s):: 7,312,875

Application Number:: 10/421,444

OSTI ID:: 921481

Country of Publication:: United States

Language:: English

References (20)

Introduction to Electron Holography Völkl, Edgar; Allard, Lawrence F.; Joy, David C. https://doi.org/10.1007/978-1-4615-4817-1	book	January 1999
Holographic Interferometry Rastogi, Pramod K. Springer Series in Optical Sciences https://doi.org/10.1007/978-3-540-48078-5	book	January 1994
Advanced electron holography: a new algorithm for image processing and a standardized quality test for the FEG electron microscope Völkl, E.; Allard, L. F.; Datye, A. Ultramicroscopy, Vol. 58, Issue 1 https://doi.org/10.1016/0304-3991(94)00182-M	journal	April 1995
Quantitative evaluation of two-dimensional dynamic deformations using digital holography Pedrini, G.; Tiziani, H. J. Optics & Laser Technology, Vol. 29, Issue 5 https://doi.org/10.1016/S0030-3992(97)00004-2	journal	July 1997
Direct sampling and demodulation of carrier-frequency signals Khare, Kedar; George, Nicholas Optics Communications, Vol. 211, Issue 1-6 https://doi.org/10.1016/S0030-4018(02)01903-X	journal	October 2002
The extended Fourier algorithm: Application in discrete optics and electron holography Voelkl, E.; Allard, L. F. Proceedings, annual meeting, Electron Microscopy Society of America, Vol. 52 https://doi.org/10.1017/S0424820100172322	journal	January 1994
Direct To Digital Holography For High Aspect Ratio Inspection of Semiconductor Wafers Thomas, C. E. (Tommy) CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY: 2003 International Conference on Characterization and Metrology for ULSI Technology, AIP Conference Proceedings https://doi.org/10.1063/1.1622480	conference	January 2003
Holographic Interferometry Heflinger, L. O.; Wuerker, R. F.; Brooks, R. E. Journal of Applied Physics, Vol. 37, Issue 2 https://doi.org/10.1063/1.1708231	journal	February 1966
Microscopy by reconstructed wave-fronts Gabor, Dennis Proceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, Vol. 197, Issue 1051, p. 454-487 https://doi.org/10.1098/rspa.1949.0075	journal	July 1949
A software package for the processing and reconstruction of electron holograms VÖLkl, E.; Allard, L. F.; Frost, B. Journal of Microscopy, Vol. 180, Issue 1 https://doi.org/10.1111/j.1365-2818.1995.tb03655.x	journal	October 1995
Holographic interferometric microscope for complete displacement determination Kruschke, Oliver Optical Engineering, Vol. 36, Issue 9 https://doi.org/10.1117/1.601420	journal	September 1997
Multipulsed digital holography applied to full 3D measurements of dynamic events Mendoza Santoyo, Fernando; Pedrini, Giancarlo; Schedin, Staffan Laser Metrology for Precision Management and Inspection in Industry, SPIE Proceedings https://doi.org/10.1117/12.439203	conference	September 2001
High-resolution photomask transmission and phase measurement tool Jacob, Jim J.; Litvin, Tim; Merriam, Andrew J. SPIE's 27th Annual International Symposium on Microlithography, SPIE Proceedings https://doi.org/10.1117/12.473409	conference	July 2002
Direct to digital holography for semiconductor wafer defect detection and review Thomas, Jr., C. E.; Bahm, Tracy M.; Baylor, Larry R. Design, Process Integration, and Characterization for Microelectronics, SPIE Proceedings https://doi.org/10.1117/12.475659	conference	July 2002
Pulsed digital holographic interferometry with 694- and 347-nm wavelengths Pedrini, Giancarlo; Tiziani, Hans J.; Gusev, Mikhail E. Applied Optics, Vol. 39, Issue 2 https://doi.org/10.1364/AO.39.000246	journal	January 2000
Fracional–Fringe Holographic Plasma Interferometry Jahoda, F. C.; Jeffries, R. A.; Sawyer, G. A. Applied Optics, Vol. 6, Issue 8 https://doi.org/10.1364/AO.6.001407	journal	January 1967
Reconstructed Wavefronts and Communication Theory* Leith, Emmett N.; Upatnieks, Juris Journal of the Optical Society of America, Vol. 52, Issue 10 https://doi.org/10.1364/JOSA.52.001123	journal	January 1962
Wavefront Reconstruction with Continuous-Tone Objects* Leith, Emmett N.; Upatnieks, Juris Journal of the Optical Society of America, Vol. 53, Issue 12 https://doi.org/10.1364/JOSA.53.001377	journal	January 1963
Wavefront Reconstruction with Diffused Illumination and Three-Dimensional Objects* Leith, Emmett N.; Upatnieks, Juris Journal of the Optical Society of America, Vol. 54, Issue 11 https://doi.org/10.1364/JOSA.54.001295	journal	January 1964
Holographic Interferometry Cookbook Jahoda, F. C.; Siemon, R. E. https://doi.org/10.2172/4601227	report	January 1972

Similar Records

Faster processing of multiple spatially-heterodyned direct to digital holograms

Patent · 2008 · OSTI ID:984950

Faster processing of multiple spatially-heterodyned direct to digital holograms

Patent · 2006 · OSTI ID:1175925

Spatial-Heterodyne Interferometry For Reflection And Transm Ission (Shirt) Measurements

Patent · 2006 · OSTI ID:880162

Two-wavelength spatial-heterodyne holography

Citation Formats

References (20)

Similar Records

Related Subjects