Method and apparatus for self-calibration of capacitive sensors
Patent
·
OSTI ID:921443
- Knoxville, TN
United States Department of Energy
- Research Organization:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC05-00OR22725
- Assignee:
- UT-Battelle, LLC (Oak Ridge, TN)
- Patent Number(s):
- 6,545,495
- Application Number:
- 09/837,142
- OSTI ID:
- 921443
- Country of Publication:
- United States
- Language:
- English
Sequential position readout from arrays of micromechanical cantilever sensors
|
journal | January 1998 |
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