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Title: Method and apparatus for self-calibration of capacitive sensors

Patent ·
OSTI ID:921443

United States Department of Energy

Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC05-00OR22725
Assignee:
UT-Battelle, LLC (Oak Ridge, TN)
Patent Number(s):
6,545,495
Application Number:
09/837,142
OSTI ID:
921443
Country of Publication:
United States
Language:
English

References (1)

Sequential position readout from arrays of micromechanical cantilever sensors journal January 1998