Combined plasma/liquid cleaning of substrates

Patent · Tue Apr 15 00:00:00 EDT 2003

OSTI ID:921358

Selwyn, Gary S ^[1]; Henins, Ivars ^[1]

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1. Los Alamos, NM

Apparatus and method for cleaning substrates. A substrate is held and rotated by a chuck and an atmospheric pressure plasma jet places a plasma onto predetermined areas of the substrate. Subsequently liquid rinse is sprayed onto the predetermined areas. In one embodiment, a nozzle sprays a gas onto the predetermined areas to assist in drying the predetermined areas when needed.

• Research Organization: Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: W-7405-ENG-36
• Assignee: The Regents of the University of California (Los Alamos, NM)
• Patent Number(s): 6,546,938
• Application Number: 09/803,065
• OSTI ID: 921358
• Country of Publication: United States
• Language: English