Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing

Patent · Tue Apr 29 00:00:00 EDT 2003

OSTI ID:921305

Bates, John B ^[1]

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1. Marietta, GA

Systems and methods are described for fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing. A method of forming a lithium cobalt oxide film includes depositing a film of lithium cobalt oxide on a substrate; rapidly heating the film of lithium cobalt oxide to a target temperature; and maintaining the film of lithium cobalt oxide at the target temperature for a target annealing time of at most, approximately 60 minutes. The systems and methods provide advantages because they require less time to implement and are, therefore less costly than previous techniques.

• Research Organization: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC05-96OR22464
• Assignee: Lockheed Martin Energy Research Corporation (Oak Ridge, TN)
• Patent Number(s): 6,555,270
• OSTI ID: 921305
• Country of Publication: United States
• Language: English