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Title: Macro-meso-microsystems integration in LTCC : LDRD report.

Abstract

Low Temperature Cofired Ceramic (LTCC) has proven to be an enabling medium for microsystem technologies, because of its desirable electrical, physical, and chemical properties coupled with its capability for rapid prototyping and scalable manufacturing of components. LTCC is viewed as an extension of hybrid microcircuits, and in that function it enables development, testing, and deployment of silicon microsystems. However, its versatility has allowed it to succeed as a microsystem medium in its own right, with applications in non-microelectronic meso-scale devices and in a range of sensor devices. Applications include silicon microfluidic ''chip-and-wire'' systems and fluid grid array (FGA)/microfluidic multichip modules using embedded channels in LTCC, and cofired electro-mechanical systems with moving parts. Both the microfluidic and mechanical system applications are enabled by sacrificial volume materials (SVM), which serve to create and maintain cavities and separation gaps during the lamination and cofiring process. SVMs consisting of thermally fugitive or partially inert materials are easily incorporated. Recognizing the premium on devices that are cofired rather than assembled, we report on functional-as-released and functional-as-fired moving parts. Additional applications for cofired transparent windows, some as small as an optical fiber, are also described. The applications described help pave the way for widespread application ofmore » LTCC to biomedical, control, analysis, characterization, and radio frequency (RF) functions for macro-meso-microsystems.« less

Authors:
; ; ; ; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Sandia National Laboratories
Sponsoring Org.:
USDOE
OSTI Identifier:
920804
Report Number(s):
SAND2007-1871
TRN: US200803%%30
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; CERAMICS; MANUFACTURING; SILICON; WINDOWS; MINIATURIZATION; USES; Molecular integrated microsystems.; Ceramic materials.; Ceramic engineering.; Low temperature research.; LOW TEMPERATURE; Ceramics.

Citation Formats

De Smet, Dennis J, Nordquist, Christopher Daniel, Turner, Timothy Shawn, Rohrer, Brandon Robinson, Walker, Charles A, Ho, Clifford K, Patel, Kamlesh D, Okandan, Murat, Rohde, Steven Barney, Wroblewski, Brian D, Pfeifer, Kent Bryant, Peterson, Kenneth Allen, and Buerger, Stephen P. Macro-meso-microsystems integration in LTCC : LDRD report.. United States: N. p., 2007. Web. doi:10.2172/920804.
De Smet, Dennis J, Nordquist, Christopher Daniel, Turner, Timothy Shawn, Rohrer, Brandon Robinson, Walker, Charles A, Ho, Clifford K, Patel, Kamlesh D, Okandan, Murat, Rohde, Steven Barney, Wroblewski, Brian D, Pfeifer, Kent Bryant, Peterson, Kenneth Allen, & Buerger, Stephen P. Macro-meso-microsystems integration in LTCC : LDRD report.. United States. doi:10.2172/920804.
De Smet, Dennis J, Nordquist, Christopher Daniel, Turner, Timothy Shawn, Rohrer, Brandon Robinson, Walker, Charles A, Ho, Clifford K, Patel, Kamlesh D, Okandan, Murat, Rohde, Steven Barney, Wroblewski, Brian D, Pfeifer, Kent Bryant, Peterson, Kenneth Allen, and Buerger, Stephen P. Thu . "Macro-meso-microsystems integration in LTCC : LDRD report.". United States. doi:10.2172/920804. https://www.osti.gov/servlets/purl/920804.
@article{osti_920804,
title = {Macro-meso-microsystems integration in LTCC : LDRD report.},
author = {De Smet, Dennis J and Nordquist, Christopher Daniel and Turner, Timothy Shawn and Rohrer, Brandon Robinson and Walker, Charles A and Ho, Clifford K and Patel, Kamlesh D and Okandan, Murat and Rohde, Steven Barney and Wroblewski, Brian D and Pfeifer, Kent Bryant and Peterson, Kenneth Allen and Buerger, Stephen P},
abstractNote = {Low Temperature Cofired Ceramic (LTCC) has proven to be an enabling medium for microsystem technologies, because of its desirable electrical, physical, and chemical properties coupled with its capability for rapid prototyping and scalable manufacturing of components. LTCC is viewed as an extension of hybrid microcircuits, and in that function it enables development, testing, and deployment of silicon microsystems. However, its versatility has allowed it to succeed as a microsystem medium in its own right, with applications in non-microelectronic meso-scale devices and in a range of sensor devices. Applications include silicon microfluidic ''chip-and-wire'' systems and fluid grid array (FGA)/microfluidic multichip modules using embedded channels in LTCC, and cofired electro-mechanical systems with moving parts. Both the microfluidic and mechanical system applications are enabled by sacrificial volume materials (SVM), which serve to create and maintain cavities and separation gaps during the lamination and cofiring process. SVMs consisting of thermally fugitive or partially inert materials are easily incorporated. Recognizing the premium on devices that are cofired rather than assembled, we report on functional-as-released and functional-as-fired moving parts. Additional applications for cofired transparent windows, some as small as an optical fiber, are also described. The applications described help pave the way for widespread application of LTCC to biomedical, control, analysis, characterization, and radio frequency (RF) functions for macro-meso-microsystems.},
doi = {10.2172/920804},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Mar 01 00:00:00 EST 2007},
month = {Thu Mar 01 00:00:00 EST 2007}
}

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