Electrostatic actuation without electrolysis in microfluidic MEMS.
Conference
·
OSTI ID:920799
No abstract prepared.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 920799
- Report Number(s):
- SAND2003-1108C; TRN: US200805%%156
- Resource Relation:
- Conference: Proposed for presentation at the Transducers 2003 Conference held June 9-12, 2003 in Boston, MA.
- Country of Publication:
- United States
- Language:
- English
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