skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Synchrotron-based Imaging and tomography with hard X-rays.

Abstract

Hard X-ray imaging with synchrotron radiation is a powerful tool to study opaque materials on the micro- and nano-lengthscales. Different imaging methods are available with an instrument recently built at Sector 34 of the Advanced Photon Source. In-line phase contrast imaging is performed with micrometer resolution. Increased spatial resolution is achieved using cone-beam geometry. The almost parallel beam is focused with a Kirkpatrick-Baez mirror system. The focal spot serves as a diverging secondary source. An X-ray magnified image of the sample is projected on the detector. For imaging and tomography with sub-100 nm resolution, an X-ray full-field microscope has been built. It uses a Kirkpatrick-Baez mirror (KB) as a condenser optic, followed by a micro-Fresnel zone plate (FZP) as an objective lens. The zone plates presently provide 50-85 nm spatial resolution when operating the microscope with photon energy between 6 and 12 keV. Tomography experiments have been performed with this new device.

Authors:
; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC); National Science Foundation (NSF); National Institute of Standards and Technology (NIST)
OSTI Identifier:
917243
Report Number(s):
ANL/XSD/JA-60069
Journal ID: ISSN 0168-583X; NIMBEU; TRN: US0804490
DOE Contract Number:
DE-AC02-06CH11357
Resource Type:
Journal Article
Resource Relation:
Journal Name: Nucl. Instrum. Methods Phys. Res. B; Journal Volume: 261; Journal Issue: Mar. 28, 2007
Country of Publication:
United States
Language:
ENGLISH
Subject:
43 PARTICLE ACCELERATORS; ADVANCED PHOTON SOURCE; GEOMETRY; MICROSCOPES; MIRRORS; PHOTONS; PLATES; RESOLUTION; SPATIAL RESOLUTION; SYNCHROTRON RADIATION; TOMOGRAPHY

Citation Formats

Rau, C., Crecea, V., Liu, W., Richter, C. P., Peterson, K. M., Jemian, P. R., Neuhausler, U., Schneider, G., Yu, X., Braun, P. V., Chiang, T. C., Robinson, I. K., X-Ray Science Division, Univ. of Illinois, Purdue Univ., Northwestern Univ., Univ. Bielefeld, Univ. Coll. London, Bessy GmbH, and NIST. Synchrotron-based Imaging and tomography with hard X-rays.. United States: N. p., 2007. Web. doi:10.1016/j.nimb.2007.03.053.
Rau, C., Crecea, V., Liu, W., Richter, C. P., Peterson, K. M., Jemian, P. R., Neuhausler, U., Schneider, G., Yu, X., Braun, P. V., Chiang, T. C., Robinson, I. K., X-Ray Science Division, Univ. of Illinois, Purdue Univ., Northwestern Univ., Univ. Bielefeld, Univ. Coll. London, Bessy GmbH, & NIST. Synchrotron-based Imaging and tomography with hard X-rays.. United States. doi:10.1016/j.nimb.2007.03.053.
Rau, C., Crecea, V., Liu, W., Richter, C. P., Peterson, K. M., Jemian, P. R., Neuhausler, U., Schneider, G., Yu, X., Braun, P. V., Chiang, T. C., Robinson, I. K., X-Ray Science Division, Univ. of Illinois, Purdue Univ., Northwestern Univ., Univ. Bielefeld, Univ. Coll. London, Bessy GmbH, and NIST. Wed . "Synchrotron-based Imaging and tomography with hard X-rays.". United States. doi:10.1016/j.nimb.2007.03.053.
@article{osti_917243,
title = {Synchrotron-based Imaging and tomography with hard X-rays.},
author = {Rau, C. and Crecea, V. and Liu, W. and Richter, C. P. and Peterson, K. M. and Jemian, P. R. and Neuhausler, U. and Schneider, G. and Yu, X. and Braun, P. V. and Chiang, T. C. and Robinson, I. K. and X-Ray Science Division and Univ. of Illinois and Purdue Univ. and Northwestern Univ. and Univ. Bielefeld and Univ. Coll. London and Bessy GmbH and NIST},
abstractNote = {Hard X-ray imaging with synchrotron radiation is a powerful tool to study opaque materials on the micro- and nano-lengthscales. Different imaging methods are available with an instrument recently built at Sector 34 of the Advanced Photon Source. In-line phase contrast imaging is performed with micrometer resolution. Increased spatial resolution is achieved using cone-beam geometry. The almost parallel beam is focused with a Kirkpatrick-Baez mirror system. The focal spot serves as a diverging secondary source. An X-ray magnified image of the sample is projected on the detector. For imaging and tomography with sub-100 nm resolution, an X-ray full-field microscope has been built. It uses a Kirkpatrick-Baez mirror (KB) as a condenser optic, followed by a micro-Fresnel zone plate (FZP) as an objective lens. The zone plates presently provide 50-85 nm spatial resolution when operating the microscope with photon energy between 6 and 12 keV. Tomography experiments have been performed with this new device.},
doi = {10.1016/j.nimb.2007.03.053},
journal = {Nucl. Instrum. Methods Phys. Res. B},
number = Mar. 28, 2007,
volume = 261,
place = {United States},
year = {Wed Mar 28 00:00:00 EDT 2007},
month = {Wed Mar 28 00:00:00 EDT 2007}
}
  • We present a double multilayer monochromator (DMM) design which has been realized for the BAMline(BESSY-II light source, Germany) as well as in an updated version for the TopoTomo beamline (ANKA light source. Germany)[1-4]. The latter contains two pairs of multilayer stripes in order to avoid absorption edges of the coating material. For both DMMs, the second multilayer offers a meridional bending option for beam compression to increase the available photon flux density. Each multilayer mirror is equipped with a vertical stage for height adjustments allowing for compensation of varying incoming beam heights and giving a certain flexibility choosing the offset.more » The second multilayer can be moved in the beam direction in order to cover the full energy range available. Furthermore, a white beam option is available.« less
  • The original monochromator design we present consists in a high-vacuum vessel comprising three monochromators mounted side-by-side: a Lauë/Lauë, a Bragg/Bragg, and a double-multilayer monochromator. The selection of one monochromator type is done remotely by sliding laterally the crystal support in the monochromator vessel. In this way, exotic combinations such as Lauë/Bragg are also possible. Installation and commissioning of the new monochromator at ESRF beamline ID19 was carried out 2013-2014 (the multilayers not being installed yet). Beamline ID19 offers not only superb beam characteristics for phase-contrast imaging with a high level of sensitivity but also compared to other synchrotron X-ray imagingmore » facilities a large beam of currently up to 7 cm × 1.3 cm. A wide energy range can be accessed in a fixed-exit mode (depending on the optics chosen the accessible energy range is between 10 keV and 200 keV). A beryllium exit window (10 cm × 10 cm active opening) completes the monochromator assembly.« less
  • While microelectronic devices are frequently characterized with surface-sensitive techniques having nanometer resolution, interconnections used in 3D integration require 3D imaging with high penetration depth and deep sub-micrometer spatial resolution. X-ray tomography is well adapted to this situation. In this context, the purpose of this study is to assess a versatile and turn-key tomographic system allowing for 3D x-ray nanotomography of copper pillars. The tomography tool uses the thin electron beam of a scanning electron microscope (SEM) to provoke x-ray emission from specific metallic targets. Then, radiographs are recorded while the sample rotates in a conventional cone beam tomography scheme thatmore » ends up with 3D reconstructions of the pillar. Starting from copper pillars data, collected at the European Synchrotron Radiation Facility, we build a 3D numerical model of a copper pillar, paying particular attention to intermetallics. This model is then used to simulate physical radiographs of the pillar using the geometry of the SEM-hosted x-ray tomography system. Eventually, data are reconstructed and it is shown that the system makes it possible the quantification of 3D intermetallics volume in copper pillars. The paper also includes a prospective discussion about resolution issues.« less
  • Transmission images and tomographic imaging based scattered radiation is evaluated from biological materials, for example, Polyethylene, Poly carbonate, Plexiglas and Nylon using 10, 15, 20 and 25 keV synchrotron X-rays. The SYRMEP facility at Elettra,Trieste, Italy and the associated detection system has been used for the image acquisition. The scattered radiation is detected for each sample at three energies at an angle of 90 deg. using Si-Pin detector coupled to a multi-channel analyzer. The contribution of transmitted, Compton and fluorescence photons are assessed for a test phantom of small dimensions. The optimum analysis is performed with the use of themore » dimensions of the sample and detected radiation at various energies.« less