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Title: Vacuum compatible, high-speed, 2-D mirror tilt stage

Abstract

A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive electronics for the scanner is fully in situ programmable and rapidly switchable.

Inventors:
;  [1]
  1. (Crockett, CA)
Publication Date:
Research Org.:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA
Sponsoring Org.:
USDOE
OSTI Identifier:
916927
Patent Number(s):
7,273,289
Assignee:
Euv LLC (Santa Clara, CA) OAK
DOE Contract Number:
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English

Citation Formats

Denham, and Paul E. Vacuum compatible, high-speed, 2-D mirror tilt stage. United States: N. p., 2007. Web.
Denham, & Paul E. Vacuum compatible, high-speed, 2-D mirror tilt stage. United States.
Denham, and Paul E. Tue . "Vacuum compatible, high-speed, 2-D mirror tilt stage". United States. doi:. https://www.osti.gov/servlets/purl/916927.
@article{osti_916927,
title = {Vacuum compatible, high-speed, 2-D mirror tilt stage},
author = {Denham and Paul E.},
abstractNote = {A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive electronics for the scanner is fully in situ programmable and rapidly switchable.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 25 00:00:00 EDT 2007},
month = {Tue Sep 25 00:00:00 EDT 2007}
}

Patent:

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