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Title: Detection of electromagnetic radiation using micromechanical multiple quantum wells structures

Patent ·
OSTI ID:913119

An apparatus and method for detecting electromagnetic radiation employs a deflectable micromechanical apparatus incorporating multiple quantum wells structures. When photons strike the quantum-well structure, physical stresses are created within the sensor, similar to a "bimetallic effect." The stresses cause the sensor to bend. The extent of deflection of the sensor can be measured through any of a variety of conventional means to provide a measurement of the photons striking the sensor. A large number of such sensors can be arranged in a two-dimensional array to provide imaging capability.

Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC05-00OR22725
Assignee:
UT-Battelle, LLC (Oak Ridge, TN)
Patent Number(s):
7,244,959
Application Number:
11/358,933
OSTI ID:
913119
Country of Publication:
United States
Language:
English

References (3)

Remote infrared radiation detection using piezoresistive microcantilevers journal November 1996
Photoinduced and thermal stress in silicon microcantilevers journal October 1998
Optical and infrared detection using microcantilevers report May 1996