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Title: Structural evolution of La-Cr-O thin film: Part II. Elasto-plastic properties by nanoindentation

Abstract

The goal of this research is to study the elasto-plastic properties of La–Cr–O thin films deposited by RF-magnetron sputtering on stainless steel interconnect materials after annealing at high temperatures in air. Elastic modulus, hardness and yield pressure derived from nanoindentation data are reported for thin films in different structural states. The amorphous film has an estimated elastic modulus of 174 GPa. The moduli of annealed films are calculated to be 150, 185 and 120 GPa after annealing at 500 °C, 600 °C and 800 °C, respectively. The film annealed at 800 °C has the lowest hardness and is dramatically different from the other structural states due to formation of the nanoporosity. The amorphous film and the films annealed at 500 °C and 600 °C both have hardness of 14 GPa, which is close to the value estimated by modeling.

Authors:
 [1];  [1];  [2]; ;
  1. Drexel University, Philadelphia, PA
  2. Michigan Technological University, Houghton, MI
Publication Date:
Research Org.:
National Energy Technology Laboratory (NETL), Pittsburgh, PA, Morgantown, WV, and Albany, OR (United States)
Sponsoring Org.:
USDOE - Office of Fossil Energy (FE)
OSTI Identifier:
912854
Report Number(s):
DOE/NETL-IR-2007-068
Journal ID: ISSN 0040-6090; TRN: US200802%%415
DOE Contract Number:  
None cited
Resource Type:
Journal Article
Resource Relation:
Journal Name: Thin Solid Films; Journal Volume: 515; Journal Issue: 5
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ANNEALING; HARDNESS; SIMULATION; SPUTTERING; STAINLESS STEELS; THIN FILMS; Ceramics; Coatings; Elastic properties; Sputtering; interconnects

Citation Formats

Lugovy, M, Coratolo, A, Orlovskaya, N, Johnson, C, and Gemmen, R S. Structural evolution of La-Cr-O thin film: Part II. Elasto-plastic properties by nanoindentation. United States: N. p., 2007. Web. doi:10.1016/j.tsf.2006.06.016.
Lugovy, M, Coratolo, A, Orlovskaya, N, Johnson, C, & Gemmen, R S. Structural evolution of La-Cr-O thin film: Part II. Elasto-plastic properties by nanoindentation. United States. doi:10.1016/j.tsf.2006.06.016.
Lugovy, M, Coratolo, A, Orlovskaya, N, Johnson, C, and Gemmen, R S. Mon . "Structural evolution of La-Cr-O thin film: Part II. Elasto-plastic properties by nanoindentation". United States. doi:10.1016/j.tsf.2006.06.016.
@article{osti_912854,
title = {Structural evolution of La-Cr-O thin film: Part II. Elasto-plastic properties by nanoindentation},
author = {Lugovy, M and Coratolo, A and Orlovskaya, N and Johnson, C and Gemmen, R S},
abstractNote = {The goal of this research is to study the elasto-plastic properties of La–Cr–O thin films deposited by RF-magnetron sputtering on stainless steel interconnect materials after annealing at high temperatures in air. Elastic modulus, hardness and yield pressure derived from nanoindentation data are reported for thin films in different structural states. The amorphous film has an estimated elastic modulus of 174 GPa. The moduli of annealed films are calculated to be 150, 185 and 120 GPa after annealing at 500 °C, 600 °C and 800 °C, respectively. The film annealed at 800 °C has the lowest hardness and is dramatically different from the other structural states due to formation of the nanoporosity. The amorphous film and the films annealed at 500 °C and 600 °C both have hardness of 14 GPa, which is close to the value estimated by modeling.},
doi = {10.1016/j.tsf.2006.06.016},
journal = {Thin Solid Films},
number = 5,
volume = 515,
place = {United States},
year = {Mon Jan 22 00:00:00 EST 2007},
month = {Mon Jan 22 00:00:00 EST 2007}
}