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Title: Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices

Abstract

MEMS structure and a method of fabricating them from ultrananocrystalline diamond films having average grain sizes of less than about 10 nm and feature resolution of less than about one micron . The MEMS structures are made by contacting carbon dimer species with an oxide substrate forming a carbide layer on the surface onto which ultrananocrystalline diamond having average grain sizes of less than about 10 nm is deposited. Thereafter, microfabrication process are used to form a structure of predetermined shape having a feature resolution of less than about one micron.

Inventors:
 [1];  [2];  [2];  [3];  [4];  [5]
  1. Downers Grove, IL
  2. Bremen, DE
  3. Bolingbrook, IL
  4. late of Naperville, IL
  5. Naperville, IL
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
912844
Patent Number(s):
6,811,612
Application Number:
10/169,879
Assignee:
The University of Chicago (Chicago, IL)
DOE Contract Number:  
W-31109-ENG-38
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Gruen, Dieter M, Busmann, Hans-Gerd, Meyer, Eva-Maria, Auciello, Orlando, Krauss, Alan R, and Krauss, Julie R. Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices. United States: N. p., 2004. Web.
Gruen, Dieter M, Busmann, Hans-Gerd, Meyer, Eva-Maria, Auciello, Orlando, Krauss, Alan R, & Krauss, Julie R. Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices. United States.
Gruen, Dieter M, Busmann, Hans-Gerd, Meyer, Eva-Maria, Auciello, Orlando, Krauss, Alan R, and Krauss, Julie R. 2004. "Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices". United States. https://www.osti.gov/servlets/purl/912844.
@article{osti_912844,
title = {Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices},
author = {Gruen, Dieter M and Busmann, Hans-Gerd and Meyer, Eva-Maria and Auciello, Orlando and Krauss, Alan R and Krauss, Julie R},
abstractNote = {MEMS structure and a method of fabricating them from ultrananocrystalline diamond films having average grain sizes of less than about 10 nm and feature resolution of less than about one micron . The MEMS structures are made by contacting carbon dimer species with an oxide substrate forming a carbide layer on the surface onto which ultrananocrystalline diamond having average grain sizes of less than about 10 nm is deposited. Thereafter, microfabrication process are used to form a structure of predetermined shape having a feature resolution of less than about one micron.},
doi = {},
url = {https://www.osti.gov/biblio/912844}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2004},
month = {11}
}