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Title: Bioparticle processing in microdevices.


No abstract prepared.

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Publication Date:
Research Org.:
Sandia National Laboratories
Sponsoring Org.:
OSTI Identifier:
Report Number(s):
TRN: US200722%%812
DOE Contract Number:
Resource Type:
Resource Relation:
Conference: Proposed for presentation at the MSB 2007 held January 14-18, 2007 in Vancouver, BC.
Country of Publication:
United States

Citation Formats

Barrett, Louise Mary, Fiechtner, Gregory J., and Singh, Anup K. Bioparticle processing in microdevices.. United States: N. p., 2007. Web.
Barrett, Louise Mary, Fiechtner, Gregory J., & Singh, Anup K. Bioparticle processing in microdevices.. United States.
Barrett, Louise Mary, Fiechtner, Gregory J., and Singh, Anup K. Mon . "Bioparticle processing in microdevices.". United States. doi:.
title = {Bioparticle processing in microdevices.},
author = {Barrett, Louise Mary and Fiechtner, Gregory J. and Singh, Anup K.},
abstractNote = {No abstract prepared.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2007},
month = {Mon Jan 01 00:00:00 EST 2007}

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  • The intent of this tutorial is to overview the technology of multi-level polysilicon surface micromachining, to present examples of devices which fully utilize this level of complexity, and to discuss what they believe to be significant issues which are not fully resolved. Following this intent, the tutorial consists of four sections. The first is an introduction and description of multi-level polysilicon surface micromachining and its potential benefits. Specifically, the inclusion of a third deposited layer of mechanical polysilicon greatly extends the degree of complexity available for micromechanism design. The second section introduces wafer planarization by CMP as a process toolmore » for surface micromachining. The third section presents examples of actuated geared micromechanisms which require the multi-level fabrication process. Demonstration of actuation mechanisms coupled to external devices are illustrated. Finally, polysilicon surface micromachining fabrication technology has reached a level where many device designs, for the most part, can be embodied in the technology to produce a mechanical construct which provides the desired function. When designed properly, the fabricated mechanical element, if free to operate, will produce the desired function. However, one set of issues which can hinder or prevent operation are related to the post-fabricated device surfaces. These surface issues; namely, stiction, friction, and wear, are emphasized in the final section as a major hindrance to realizing the full potential of surface micromachined devices.« less
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  • A relatively large volume (12,450 gal) of water significant to oil-shale processing by in situ combustion was required to perform environmental studies at the U.S. ERDA Laramie Energy Research Center. This effluent is a relatively scarce commodity for research purposes. This study is concerned with the identification of problems and the solutions to problems associated with the aquisition, processing, and storage of a large stock reserve of environmental research water. Special attention is given to the practical aspects of field collection procedures, processing by filtration to remove suspended materials, and mitigation of chemical instability induced by microbial degradation of dissolvedmore » components.« less