Controllable shrinking and shaping of silicon nitride nanopores under electron irradiation
Journal Article
·
· Applied Physics Letters, 90(16):Art. No. 163102
Modification of the Si3N4 nanopore was investigated under electron beam (e-beam) irradiation using a scanning electron microscope (SEM) and the results show that all the pores with diameters ranging from 40-200 nm can be shrunk and reshaped. The shrinkage rate increases with the energy deposited in the membrane. By using the selected area scan tool in the SEM, different shapes of Si3N4 nanopores have been fabricated successfully based on localized e-beam-induced joule heat, with characteristic dimension smaller than 10 nm. A novel technique was proposed to shrink and shape the nanopore to a special structure controllably.
- Research Organization:
- Pacific Northwest National Lab. (PNNL), Richland, WA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC05-76RL01830
- OSTI ID:
- 908735
- Report Number(s):
- PNNL-SA-54222; APPLAB; KC0201020; TRN: US200722%%767
- Journal Information:
- Applied Physics Letters, 90(16):Art. No. 163102, Vol. 90, Issue 16; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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