Long working distance incoherent interference microscope

Patent · 25 April 2006

OSTI ID:908523

Sinclair, Michael B ^[1]; De Boer, Maarten P ^[1]

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1. Albuquerque, NM

A full-field imaging, long working distance, incoherent interference microscope suitable for three-dimensional imaging and metrology of MEMS devices and test structures on a standard microelectronics probe station. A long working distance greater than 10 mm allows standard probes or probe cards to be used. This enables nanometer-scale 3-dimensional height profiles of MEMS test structures to be acquired across an entire wafer while being actively probed, and, optionally, through a transparent window. An optically identical pair of sample and reference arm objectives is not required, which reduces the overall system cost, and also the cost and time required to change sample magnifications. Using a LED source, high magnification (e.g., 50.times.) can be obtained having excellent image quality, straight fringes, and high fringe contrast.

• Research Organization: Sandia National Laboratories (SNL-NM), Albuquerque, NM
• Sponsoring Organization: United States Department of Energy
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): 7,034,271
• Application Number: 10/857,115
• OSTI ID: 908523
• Country of Publication: United States
• Language: English

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