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Title: Micro environmental sensing device

Abstract

A microelectromechanical (MEM) acceleration switch is disclosed which includes a proof mass flexibly connected to a substrate, with the proof mass being moveable in a direction substantially perpendicular to the substrate in response to a sensed acceleration. An electrode on the proof mass contacts one or more electrodes located below the proof mass to provide a switch closure in response to the sensed acceleration. Electrical latching of the switch in the closed position is possible with an optional latching electrode. The MEM acceleration switch, which has applications for use as an environmental sensing device, can be fabricated using micromachining.

Inventors:
 [1];  [1]
  1. (Tijeras, NM)
Publication Date:
Research Org.:
Sandia National Laboratories (SNL-NM), Albuquerque, NM
Sponsoring Org.:
USDOE
OSTI Identifier:
908516
Patent Number(s):
7,038,150
Assignee:
Sandia Corporation (Albuquerque, NM) ALO
DOE Contract Number:
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English

Citation Formats

Polosky, Marc A., and Lukens, Laurance L. Micro environmental sensing device. United States: N. p., 2006. Web.
Polosky, Marc A., & Lukens, Laurance L. Micro environmental sensing device. United States.
Polosky, Marc A., and Lukens, Laurance L. Tue . "Micro environmental sensing device". United States. doi:. https://www.osti.gov/servlets/purl/908516.
@article{osti_908516,
title = {Micro environmental sensing device},
author = {Polosky, Marc A. and Lukens, Laurance L.},
abstractNote = {A microelectromechanical (MEM) acceleration switch is disclosed which includes a proof mass flexibly connected to a substrate, with the proof mass being moveable in a direction substantially perpendicular to the substrate in response to a sensed acceleration. An electrode on the proof mass contacts one or more electrodes located below the proof mass to provide a switch closure in response to the sensed acceleration. Electrical latching of the switch in the closed position is possible with an optional latching electrode. The MEM acceleration switch, which has applications for use as an environmental sensing device, can be fabricated using micromachining.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 02 00:00:00 EDT 2006},
month = {Tue May 02 00:00:00 EDT 2006}
}

Patent:

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