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U.S. Department of Energy
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System for generating two-dimensional masks from a three-dimensional model using topological analysis

Patent ·
OSTI ID:908352
A method of generating two-dimensional masks from a three-dimensional model comprises providing a three-dimensional model representing a micro-electro-mechanical structure for manufacture and a description of process mask requirements, reducing the three-dimensional model to a topological description of unique cross sections, and selecting candidate masks from the unique cross sections and the cross section topology. The method further can comprise reconciling the candidate masks based on the process mask requirements description to produce two-dimensional process masks.
Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM
Sponsoring Organization:
United States Department of Energy
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
7,065,736
OSTI ID:
908352
Country of Publication:
United States
Language:
English

References (1)

Development of a geometry-based process planning system for surface micromachining journal January 2002

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